Jochen Weber

Person

Grosskuchen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Projection lens system of a microlithographic projection exposure i...
- Patent number 9,164,396
- Issue date Oct 20, 2015
- Carl Zeiss SMT GmbH
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection exposure apparatus for semiconductor lithography includi...
- Patent number 9,030,644
- Issue date May 12, 2015
- Carl Zeiss SMT GmbH
- Benjamin Sigel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element and method
- Patent number 8,891,172
- Issue date Nov 18, 2014
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 8,514,371
- Issue date Aug 20, 2013
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical element and method
- Patent number 8,508,854
- Issue date Aug 13, 2013
- Carl Zeiss SMT GmbH
- Eric Eva
- G02 - OPTICS
Information Patent Grant
Optical correction device
- Patent number 8,325,322
- Issue date Dec 4, 2012
- Carl Zeiss SMT GmbH
- Markus Hauf
- G02 - OPTICS
Information Patent Grant
Projection lens system of a microlithographic projection exposure i...
- Patent number 8,319,944
- Issue date Nov 27, 2012
- Carl Zeiss SMT GmbH
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,990,622
- Issue date Aug 2, 2011
- Carl Zeiss SMT GmbH
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,961,294
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Projection objective of a microlithographic projection exposure app...
- Patent number 7,830,611
- Issue date Nov 9, 2010
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Grant
Projection lens system of a microlithographic projection exposure i...
- Patent number 7,782,440
- Issue date Aug 24, 2010
- Carl Zeiss SMT AG
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical assembly, projection exposure apparatus and projection obje...
- Patent number 7,768,721
- Issue date Aug 3, 2010
- Carl Zeiss SMT AG
- Jochen Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,710,542
- Issue date May 4, 2010
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure machine
- Patent number 7,486,382
- Issue date Feb 3, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Imaging device in a projection exposure facility
- Patent number 7,304,717
- Issue date Dec 4, 2007
- Carl Zelss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20190121238
- Publication date Apr 25, 2019
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20150316855
- Publication date Nov 5, 2015
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...
- Publication number 20130070224
- Publication date Mar 21, 2013
- Carl Zeiss SMT GMBH
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICES HAVING KINEMATIC COMPONENTS
- Publication number 20130038848
- Publication date Feb 14, 2013
- Carl Zeiss SMT GMBH
- Jochen Weber
- G02 - OPTICS
Information Patent Application
PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...
- Publication number 20110317140
- Publication date Dec 29, 2011
- Carl Zeiss SMT GMBH
- Benjamin Sigel
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20110199597
- Publication date Aug 18, 2011
- Carl Zeiss SMT GMBH
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT AND METHOD
- Publication number 20110080569
- Publication date Apr 7, 2011
- Carl Zeiss SMT GMBH
- Eric Eva
- G02 - OPTICS
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20110019169
- Publication date Jan 27, 2011
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...
- Publication number 20100265478
- Publication date Oct 21, 2010
- Carl Zeiss SMT AG
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL CORRECTION DEVICE
- Publication number 20100201958
- Publication date Aug 12, 2010
- Carl Zeiss SMT AG
- Markus Hauf
- G02 - OPTICS
Information Patent Application
OPTICAL ELEMENT AND METHOD
- Publication number 20090257032
- Publication date Oct 15, 2009
- Carl Zeiss SMT AG
- Eric Eva
- G02 - OPTICS
Information Patent Application
Imaging Device in a Projection Exposure Machine
- Publication number 20090141258
- Publication date Jun 4, 2009
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY
- Publication number 20090040487
- Publication date Feb 12, 2009
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJE...
- Publication number 20080316621
- Publication date Dec 25, 2008
- Jochen Weber
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...
- Publication number 20080239503
- Publication date Oct 2, 2008
- Carl Zeiss SMT AG
- Olaf Conradi
- G02 - OPTICS
Information Patent Application
IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE
- Publication number 20080174757
- Publication date Jul 24, 2008
- Carl Zeiss SMT AG
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICES HAVING KINEMTAIC COMPONENTS
- Publication number 20080117397
- Publication date May 22, 2008
- Carl Zeiss SMT AG
- Jochen Weber
- G02 - OPTICS
Information Patent Application
Projection Lens System of a Microlithographic Projection Exposure I...
- Publication number 20080106711
- Publication date May 8, 2008
- Carl Zeiss SMT AG
- Helmut Beierl
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure machine
- Publication number 20060164619
- Publication date Jul 27, 2006
- Carl Zeiss SMT AG
- Stephan Back
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Imaging device in a projection exposure facility
- Publication number 20040263812
- Publication date Dec 30, 2004
- Wolfgang Hummel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Jochen Weber

Person

Patents Grantslast 30 patents

Projection lens system of a microlithographic projection exposure i...

Projection exposure apparatus for semiconductor lithography includi...

Optical element and method

Imaging device in a projection exposure facility

Optical element and method

Optical correction device

Projection lens system of a microlithographic projection exposure i...

Projection objective of a microlithographic projection exposure app...

Imaging device in a projection exposure facility

Projection objective of a microlithographic projection exposure app...

Projection lens system of a microlithographic projection exposure i...

Optical assembly, projection exposure apparatus and projection obje...

Imaging device in a projection exposure machine

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility

Patents Applicationslast 30 patents

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...

PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...

OPTICAL DEVICES HAVING KINEMATIC COMPONENTS

PROJECTION EXPOSURE APPARATUS FOR SEMICONDUCTOR LITHOGRAPHY INCLUDI...

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

OPTICAL ELEMENT AND METHOD

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

PROJECTION LENS SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE I...

OPTICAL CORRECTION DEVICE

OPTICAL ELEMENT AND METHOD

Imaging Device in a Projection Exposure Machine

IMAGING DEVICE IN A PROJECTION EXPOSURE FACILITY

OPTICAL ASSEMBLY, PROJECTION EXPOSURE APPARATUS AND PROJECTION OBJE...

PROJECTION OBJECTIVE OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APP...

IMAGING DEVICE IN A PROJECTION EXPOSURE MACHINE

OPTICAL DEVICES HAVING KINEMTAIC COMPONENTS

Projection Lens System of a Microlithographic Projection Exposure I...

Imaging device in a projection exposure machine

Imaging device in a projection exposure facility