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Joe Ferrara
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Georgetown, MA, US
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last 30 patents
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Patent Grant
Shallow angle, multi-wavelength, multi-receiver, adjustable sensiti...
Patent number
10,794,694
Issue date
Oct 6, 2020
Axcelis Technologies, Inc.
John F. Baggett
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Wafer temperature control with consideration to beam power input
Patent number
10,128,084
Issue date
Nov 13, 2018
Axcelis Technologies, Inc.
John Baggett
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SHALLOW ANGLE, MULTI-WAVELENGTH, MULTI-RECEIVER, ADJUSTABLE SENSITI...
Publication number
20190120617
Publication date
Apr 25, 2019
Axcelis Technologies, Inc.
John F. Baggett
G01 - MEASURING TESTING