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Joe Sakai
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Veldhoven, NL
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last 30 patents
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Patent Grant
Lithographic apparatus, beam delivery systems, prisms and device ma...
Patent number
7,507,976
Issue date
Mar 24, 2009
ASML Netherlands B.V.
Hako Botma
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and positioning apparatus
Patent number
7,405,811
Issue date
Jul 29, 2008
ASML Netherlands B.V.
Marcel Hendrikus Maria Beems
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and positioning apparatus
Patent number
7,349,069
Issue date
Mar 25, 2008
ASML Netherlands B.V.
Marcel Hendrikus Maria Beems
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic apparatus, beam delivery systems, prisms and device ma...
Publication number
20080067424
Publication date
Mar 20, 2008
ASML NETHERLANDS B.V.
Hako Botma
G02 - OPTICS
Information
Patent Application
Lithographic apparatus and positioning apparatus
Publication number
20060238733
Publication date
Oct 26, 2006
ASML NETHERLANDS B.V.
Marcel Hendrikus Maria Beems
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithogaphic apparatus and positioning apparatus
Publication number
20060238731
Publication date
Oct 26, 2006
ASML NETHERLANDS B.V.
Marcel Hendrikus Maria Beems
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY