Joel Huston

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Substrate support for reduced damage substrate backside
- Patent number 11,955,362
- Issue date Apr 9, 2024
- Applied Materials, Inc.
- Joel M Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing chamber having heated showerhead assembly
- Patent number 11,598,003
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Faruk Gungor
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature process chamber lid
- Patent number 10,879,090
- Issue date Dec 29, 2020
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Support assembly
- Patent number 10,593,539
- Issue date Mar 17, 2020
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual-direction chemical delivery system for ALD/CVD chambers
- Patent number 10,400,335
- Issue date Sep 3, 2019
- Applied Materials, Inc.
- Zhenbin Ge
- B08 - CLEANING
Information Patent Grant
Hot wall reactor with cooled vacuum containment
- Patent number 9,837,250
- Issue date Dec 5, 2017
- Applied Materials, Inc.
- Joel M. Huston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature process chamber lid
- Patent number 9,831,109
- Issue date Nov 28, 2017
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Dual-direction chemical delivery system for ALD/CVD chambers
- Patent number 9,765,432
- Issue date Sep 19, 2017
- Applied Materials, Inc.
- Zhenbin Ge
- B08 - CLEANING
Information Patent Grant
Methods and apparatus for in-situ cleaning of a process chamber
- Patent number 9,627,185
- Issue date Apr 18, 2017
- Applied Materials, Inc.
- Joel M. Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with controlled sealing gap
- Patent number 9,543,186
- Issue date Jan 10, 2017
- Applied Materials, Inc.
- Olkan Cuvalci
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Dual-direction chemical delivery system for ALD/CVD chambers
- Patent number 9,353,440
- Issue date May 31, 2016
- Applied Materials, Inc.
- Zhenbin Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for removing oxides
- Patent number 8,846,163
- Issue date Sep 30, 2014
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead assembly
- Patent number 8,343,307
- Issue date Jan 1, 2013
- Applied Materials, Inc.
- Joel M. Huston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas coupler for substrate processing chamber
- Patent number 8,216,374
- Issue date Jul 10, 2012
- Applied Materials, Inc.
- Joel Huston
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Direct real-time monitoring and feedback control of RF plasma outpu...
- Patent number 7,910,853
- Issue date Mar 22, 2011
- Applied Materials, Inc.
- David T. Or
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for measuring a thickness of a layer of a wafer
- Patent number 7,777,483
- Issue date Aug 17, 2010
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,767,024
- Issue date Aug 3, 2010
- Appplied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly for front end of line fabrication
- Patent number 7,520,957
- Issue date Apr 21, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for front end of line fabrication
- Patent number 7,396,480
- Issue date Jul 8, 2008
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method of dynamically measuring thickness of a layer...
- Patent number 7,355,394
- Issue date Apr 8, 2008
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for dynamically measuring the thickness of an...
- Patent number 7,112,961
- Issue date Sep 26, 2006
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Grant
Piezoelectric vaporizer
- Patent number 6,926,774
- Issue date Aug 9, 2005
- Applied Materials, Inc.
- Ted G. Yoshidome
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Cold trap assembly
- Patent number 6,517,592
- Issue date Feb 11, 2003
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High temperature chemical vapor deposition chamber
- Patent number 6,364,954
- Issue date Apr 2, 2002
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid vaporizers for semiconductor processing systems
- Patent number 6,332,601
- Issue date Dec 25, 2001
- Applied Materials
- Joel M. Huston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Integrated temperature controlled exhaust and cold trap assembly
- Patent number 6,206,971
- Issue date Mar 27, 2001
- Applied Materials, Inc.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Liquid vaporizer systems and methods for their use
- Patent number 6,179,277
- Issue date Jan 30, 2001
- Applied Materials, Inc.
- Joel M. Huston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Fluid delivery system and method
- Patent number 6,083,321
- Issue date Jul 4, 2000
- Applied Materials, Inc.
- Lawrence Lei
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Apparatus and Methods for Self-Assembled Monolayer (SAM) Deposition...
- Publication number 20230212747
- Publication date Jul 6, 2023
- Kevin KASHEFI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT ASSEMBLY
- Publication number 20210225640
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Chien-Teh Kao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUPPORT ASSEMBLY
- Publication number 20200006054
- Publication date Jan 2, 2020
- Applied Materials, Inc.
- Chien-Teh KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE
- Publication number 20190080951
- Publication date Mar 14, 2019
- Joel M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY
- Publication number 20190078210
- Publication date Mar 14, 2019
- FARUK GUNGOR
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
High Temperature Process Chamber Lid
- Publication number 20180053667
- Publication date Feb 22, 2018
- Applied Materials, Inc.
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual-Direction Chemical Delivery System For ALD/CVD Chambers
- Publication number 20170362710
- Publication date Dec 21, 2017
- Applied Materials, Inc.
- Zhenbin Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual-Direction Chemical Delivery System For ALD/CVD Chambers
- Publication number 20160273108
- Publication date Sep 22, 2016
- Applied Materials, Inc.
- Zhenbin Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Dual-Direction Chemical Delivery System for ALD/CVD Chambers
- Publication number 20150176126
- Publication date Jun 25, 2015
- Applied Materials, Inc.
- Zhenbin Ge
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR IN-SITU CLEANING OF A PROCESS CHAMBER
- Publication number 20150155142
- Publication date Jun 4, 2015
- Applied Materials, Inc.
- JOEL M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HOT WALL REACTOR WITH COOLED VACUUM CONTAINMENT
- Publication number 20150059981
- Publication date Mar 5, 2015
- Applied Materials, Inc.
- JOEL M. HUSTON
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
High Temperature Process Chamber Lid
- Publication number 20140252015
- Publication date Sep 11, 2014
- Ilker Durukan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP
- Publication number 20140217665
- Publication date Aug 7, 2014
- Applied Materials, Inc.
- OLKAN CUVALCI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
Apparatus And Methods For Symmetrical Gas Distribution With High Pu...
- Publication number 20140174362
- Publication date Jun 26, 2014
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
MODULAR CHEMICAL DELIVERY SYSTEM
- Publication number 20140137961
- Publication date May 22, 2014
- Applied Materials, Inc.
- CHIEN-TEH KAO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI CHAMBER PROCESSING SYSTEM
- Publication number 20140076234
- Publication date Mar 20, 2014
- Applied Materials, Inc.
- Chien-Teh KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT ASSEMBLY
- Publication number 20120267346
- Publication date Oct 25, 2012
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20120244704
- Publication date Sep 27, 2012
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20110223755
- Publication date Sep 15, 2011
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECT REAL-TIME MONITORING AND FEEDBACK CONTROL OF RF PLASMA OUTPU...
- Publication number 20090218324
- Publication date Sep 3, 2009
- APPLIED MATERIALS, INC.
- David T. Or
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR REMOVING OXIDES
- Publication number 20090111280
- Publication date Apr 30, 2009
- Applied Materials, Inc.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUPPORT ASSEMBLY
- Publication number 20090095621
- Publication date Apr 16, 2009
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD ASSEMBLY
- Publication number 20090095334
- Publication date Apr 16, 2009
- Joel M. Huston
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR FRONT END OF LINE FABRICATION
- Publication number 20080268645
- Publication date Oct 30, 2008
- CHIEN-TEH KAO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR MEASURING OBJECT THICKNESS
- Publication number 20080186022
- Publication date Aug 7, 2008
- Applied Materials, Inc., a Delaware corporation
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Application
GAS COUPLER FOR SUBSTRATE PROCESSING CHAMBER
- Publication number 20070144436
- Publication date Jun 28, 2007
- APPLIED MATERIALS, INC.
- Joel Huston
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method and apparatus for measuring object thickness
- Publication number 20070063698
- Publication date Mar 22, 2007
- Applied Materials, Inc.
- Lawrence C. Lei
- G01 - MEASURING TESTING
Information Patent Application
In-situ dry clean chamber for front end of line fabrication
- Publication number 20050230350
- Publication date Oct 20, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Lid assembly for front end of line fabrication
- Publication number 20050218507
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Substrate support for in-situ dry clean chamber for front end of li...
- Publication number 20050221552
- Publication date Oct 6, 2005
- APPLIED MATERIALS, INC.
- Chien-Teh Kao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Joel Huston

Person

Patents Grantslast 30 patents

Substrate support for reduced damage substrate backside

Substrate processing chamber having heated showerhead assembly

High temperature process chamber lid

Support assembly

Dual-direction chemical delivery system for ALD/CVD chambers

Hot wall reactor with cooled vacuum containment

High temperature process chamber lid

Dual-direction chemical delivery system for ALD/CVD chambers

Methods and apparatus for in-situ cleaning of a process chamber

Substrate support with controlled sealing gap

Dual-direction chemical delivery system for ALD/CVD chambers

Method for removing oxides

Showerhead assembly

Gas coupler for substrate processing chamber

Direct real-time monitoring and feedback control of RF plasma outpu...

Method and apparatus for measuring a thickness of a layer of a wafer

Method for front end of line fabrication

Lid assembly for front end of line fabrication

Method for front end of line fabrication

Apparatus and method of dynamically measuring thickness of a layer...

Method and apparatus for dynamically measuring the thickness of an...

Piezoelectric vaporizer

Cold trap assembly

High temperature chemical vapor deposition chamber

Liquid vaporizers for semiconductor processing systems

Integrated temperature controlled exhaust and cold trap assembly

Liquid vaporizer systems and methods for their use

Fluid delivery system and method

Patents Applicationslast 30 patents

Apparatus and Methods for Self-Assembled Monolayer (SAM) Deposition...

SUPPORT ASSEMBLY

SUPPORT ASSEMBLY

SUBSTRATE SUPPORT FOR REDUCED DAMAGE SUBSTRATE BACKSIDE

SUBSTRATE PROCESSING CHAMBER HAVING HEATED SHOWERHEAD ASSEMBLY

High Temperature Process Chamber Lid

Dual-Direction Chemical Delivery System For ALD/CVD Chambers

Dual-Direction Chemical Delivery System For ALD/CVD Chambers

Dual-Direction Chemical Delivery System for ALD/CVD Chambers

METHODS AND APPARATUS FOR IN-SITU CLEANING OF A PROCESS CHAMBER

HOT WALL REACTOR WITH COOLED VACUUM CONTAINMENT

High Temperature Process Chamber Lid

SUBSTRATE SUPPORT WITH CONTROLLED SEALING GAP

Apparatus And Methods For Symmetrical Gas Distribution With High Pu...

MODULAR CHEMICAL DELIVERY SYSTEM

MULTI CHAMBER PROCESSING SYSTEM

SUPPORT ASSEMBLY

METHOD FOR REMOVING OXIDES

METHOD FOR REMOVING OXIDES

DIRECT REAL-TIME MONITORING AND FEEDBACK CONTROL OF RF PLASMA OUTPU...

METHOD FOR REMOVING OXIDES

SUPPORT ASSEMBLY

SHOWERHEAD ASSEMBLY

METHOD FOR FRONT END OF LINE FABRICATION

METHOD AND APPARATUS FOR MEASURING OBJECT THICKNESS

GAS COUPLER FOR SUBSTRATE PROCESSING CHAMBER

Method and apparatus for measuring object thickness

In-situ dry clean chamber for front end of line fabrication

Lid assembly for front end of line fabrication

Substrate support for in-situ dry clean chamber for front end of li...