Joel Ng

Person

San Leandro, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Method for OES data collection and endpoint detection
- Patent number 12,362,158
- Issue date Jul 15, 2025
- Tokyo Electron Limited
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical emission spectroscopy for advanced process characterization
- Patent number 12,306,044
- Issue date May 20, 2025
- Tokyo Electron Limited
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Grant
Time-resolved OES data collection
- Patent number 12,158,374
- Issue date Dec 3, 2024
- Tokyo Electron Limited
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Grant
Advanced optical sensor and method for detecting an optical event i...
- Patent number 10,692,705
- Issue date Jun 23, 2020
- Tokyo Electron Limited
- Mihail Mihaylov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam splitter/combiner for optical metrology tool
- Patent number 7,251,036
- Issue date Jul 31, 2007
- Therma-Wave, Inc.
- James Hendrix
- G01 - MEASURING TESTING
Information Patent Grant
Flat spectrum illumination source for optical metrology
- Patent number 7,154,607
- Issue date Dec 26, 2006
- Therma-Wave, Inc.
- James Lee Hendrix
- G01 - MEASURING TESTING
Information Patent Grant
Beam splitter/combiner for optical meterology tool
- Patent number 7,027,158
- Issue date Apr 11, 2006
- Therma-Wave, Inc.
- James Hendrix
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Advanced OES Characterization
- Publication number 20240339309
- Publication date Oct 10, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240234111
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240230409
- Publication date Jul 11, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Time-Resolved OES Data Collection
- Publication number 20240133742
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- G01 - MEASURING TESTING
Information Patent Application
Method for OES Data Collection and Endpoint Detection
- Publication number 20240136164
- Publication date Apr 25, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optical Emission Spectroscopy for Advanced Process Characterization
- Publication number 20240094056
- Publication date Mar 21, 2024
- TOKYO ELECTRON LIMITED
- Sergey Voronin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ADVANCED OPTICAL SENSOR AND METHOD FOR PLASMA CHAMBER
- Publication number 20170140905
- Publication date May 18, 2017
- TOKYO ELECTRON LIMITED
- Mihail Mihaylov
- G01 - MEASURING TESTING
Information Patent Application
Beam splitter/combiner for optical metrology tool
- Publication number 20060126071
- Publication date Jun 15, 2006
- Therma-Wave, Inc. (ARO)
- James Hendrix
- G01 - MEASURING TESTING
Information Patent Application
Flat spectrum illumination source for optical metrology
- Publication number 20040150828
- Publication date Aug 5, 2004
- James Lee Hendrix
- G01 - MEASURING TESTING
Information Patent Application
Beam splitter/combiner for optical meterology tool
- Publication number 20030169425
- Publication date Sep 11, 2003
- James Hendrix
- G01 - MEASURING TESTING

Person

Patents Grantslast 30 patents

Method for OES data collection and endpoint detection

Optical emission spectroscopy for advanced process characterization

Time-resolved OES data collection

Advanced optical sensor and method for detecting an optical event i...

Beam splitter/combiner for optical metrology tool

Flat spectrum illumination source for optical metrology

Beam splitter/combiner for optical meterology tool

Patents Applicationslast 30 patents

Advanced OES Characterization

Method for OES Data Collection and Endpoint Detection

Time-Resolved OES Data Collection

Time-Resolved OES Data Collection

Method for OES Data Collection and Endpoint Detection

Optical Emission Spectroscopy for Advanced Process Characterization

ADVANCED OPTICAL SENSOR AND METHOD FOR PLASMA CHAMBER

Beam splitter/combiner for optical metrology tool

Flat spectrum illumination source for optical metrology

Beam splitter/combiner for optical meterology tool