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Joerg Ackermann
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Crimmitschau, DE
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Patents Grants
last 30 patents
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Patent Grant
Scanning charged particle beams
Patent number
8,304,750
Issue date
Nov 6, 2012
Carl Zeiss NTS GmbH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
SCANNING CHARGED PARTICLE BEAMS
Publication number
20100294930
Publication date
Nov 25, 2010
CARL ZEISS NTS GMBH
Dirk Preikszas
H01 - BASIC ELECTRIC ELEMENTS