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Joerg Bruebach
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Eindhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Pulse modifier, lithographic apparatus, and device manufacturing me...
Patent number
7,432,517
Issue date
Oct 7, 2008
ASML Netherlands B.V.
Hako Botma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,230,678
Issue date
Jun 12, 2007
ASML Netherlands B.V.
Joerg Bruebach
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Pulse modifier, lithographic apparatus, and device manufacturing me...
Publication number
20060126681
Publication date
Jun 15, 2006
ASML NETHERLANDS B.V.
Hako Botma
B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Lithographic apparatus, device manufacturing method, and device man...
Publication number
20050078292
Publication date
Apr 14, 2005
ASML NETHERLANDS B.V.
Joerg Bruebach
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY