Joerg Frederik Blumrich

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Jena, DE

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for characterizing a microlithographic mask
- Patent number 11,914,303
- Issue date Feb 27, 2024
- Carl Zeiss SMT GmbH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining a distance between a first structure element...
- Patent number 10,535,132
- Issue date Jan 14, 2020
- Carl Zeiss SMT SmbH
- Joerg Frederik Blumrich
- G02 - OPTICS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20240152057
- Publication date May 9, 2024
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD FOR CHARACTERIZING A MICROLITHOGRAPHIC MASK
- Publication number 20210397099
- Publication date Dec 23, 2021
- Carl Zeiss SMT GMBH
- Johannes Ruoff
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR DETERMINING A DISTANCE BETWEEN A FIRST STRUCTURE ELEMENT...
- Publication number 20180089817
- Publication date Mar 29, 2018
- Carl Zeiss SMT GMBH
- Joerg Frederik Blumrich
- G02 - OPTICS