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Joerg Mueller
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Hamburg, DE
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last 30 patents
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Patent Grant
MEMS element
Patent number
8,679,355
Issue date
Mar 25, 2014
NXP, B.V.
Hauke Pohlmann
B81 - MICRO-STRUCTURAL TECHNOLOGY
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last 30 patents
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Patent Application
MEMS ELEMENT
Publication number
20120122314
Publication date
May 17, 2012
NXP B.V.
Hauke Pohlmann
B81 - MICRO-STRUCTURAL TECHNOLOGY