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Joerg Tschischgale
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Method for exposing a semiconductor wafer by applying periodic move...
Patent number
7,443,484
Issue date
Oct 28, 2008
Infineon Technologies AG
Christoph Nölscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Optical system of a microlithographic projection exposure apparatus
Patent number
7,423,765
Issue date
Sep 9, 2008
Carl Zeiss SMT AG
Joerg Tschischgale
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
PROJECTION EXPOSURE APPARATUS AND METHOD FOR DESIGNING A COMPONENT...
Publication number
20240085800
Publication date
Mar 14, 2024
Carl Zeiss SMT GMBH
Thilo Pollak
G02 - OPTICS
Information
Patent Application
OPTICAL SYSTEM OF A MICROLITHOGRAPHIC PROJECTION EXPOSURE APPARATUS
Publication number
20100201960
Publication date
Aug 12, 2010
Carl Zeiss SMT AG
Joerg Tschischgale
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Metrology Mark with Elements Arranged in a Matrix, Method of Manufa...
Publication number
20100052191
Publication date
Mar 4, 2010
QIMONDA AG
Sven Trogisch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Non-Telecentric Lithography Apparatus and Method of Manufacturing I...
Publication number
20090097001
Publication date
Apr 16, 2009
QIMONDA AG
Sven Trogisch
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Arrangement for the transfer of structural elements of a photomask...
Publication number
20070229790
Publication date
Oct 4, 2007
Bernd Kuechler
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for exposing a semiconductor wafer
Publication number
20060256314
Publication date
Nov 16, 2006
Christoph Nolscher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Optical system of a microlithographic projection exposure apparatus
Publication number
20060023179
Publication date
Feb 2, 2006
Carl Zeiss
Joerg Tschischgale
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY