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Eindhoven, NL
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last 30 patents
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Patent Grant
Method for temperature control of a component
Patent number
11,372,341
Issue date
Jun 28, 2022
Carl Zeiss SMT GmbH
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for temperature control of a component
Patent number
11,022,903
Issue date
Jun 1, 2021
Carl Zeiss SMT GmbH
Joeri Lof
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,962,891
Issue date
Mar 30, 2021
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,788,755
Issue date
Sep 29, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,678,139
Issue date
Jun 9, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,656,538
Issue date
May 19, 2020
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,620,545
Issue date
Apr 14, 2020
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,503,084
Issue date
Dec 10, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,466,595
Issue date
Nov 5, 2019
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of calibrating a reluctance actuator assembly, reluctance ac...
Patent number
10,372,045
Issue date
Aug 6, 2019
ASML Netherlands B.V.
Johannes Antonius Gerardus Akkermans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate handling system and lithographic apparatus
Patent number
10,345,723
Issue date
Jul 9, 2019
ASML Netherlands B.V.
Michael Johannes Vervoordeldonk
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,261,428
Issue date
Apr 16, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,222,706
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,191,389
Issue date
Jan 29, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,180,629
Issue date
Jan 15, 2019
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
10,151,989
Issue date
Dec 11, 2018
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor system, substrate handling system and lithographic apparatus
Patent number
10,007,197
Issue date
Jun 26, 2018
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,885,965
Issue date
Feb 6, 2018
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,798,246
Issue date
Oct 24, 2017
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,740,107
Issue date
Aug 22, 2017
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,733,575
Issue date
Aug 15, 2017
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,588,442
Issue date
Mar 7, 2017
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method involving a...
Patent number
9,541,843
Issue date
Jan 10, 2017
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,482,966
Issue date
Nov 1, 2016
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,477,160
Issue date
Oct 25, 2016
ASML Netherland B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,383,655
Issue date
Jul 5, 2016
ASML Netherlands B.V.
Bob Streefkerk
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,366,972
Issue date
Jun 14, 2016
ASML Netherlands B.V.
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
9,360,765
Issue date
Jun 7, 2016
ASML Netherlands B.V.
Christiaan Alexander Hoogendam
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus configured to reconstruct an aerial pattern...
Patent number
9,329,500
Issue date
May 3, 2016
ASML Netherlands B.V.
Frank Staals
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Backscatter reduction in thin electron detectors
Patent number
9,269,531
Issue date
Feb 23, 2016
FEI Company
Michael Alwin William Stekelenburg
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
METHOD FOR TEMPERATURE CONTROL OF A COMPONENT
Publication number
20210286272
Publication date
Sep 16, 2021
Carl Zeiss SMT GMBH
Joeri Lof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for temperature control of a component
Publication number
20200233318
Publication date
Jul 23, 2020
Carl Zeiss SMT GMBH
Joeri Lof
G02 - OPTICS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20200225590
Publication date
Jul 16, 2020
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190302631
Publication date
Oct 3, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190265596
Publication date
Aug 29, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190250518
Publication date
Aug 15, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190212661
Publication date
Jul 11, 2019
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20190086821
Publication date
Mar 21, 2019
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20190033733
Publication date
Jan 31, 2019
ASML NETHERLANDS B.V.
Michael Johannes VERVOORDELDONK
B65 - CONVEYING PACKING STORING HANDLING THIN OR FILAMENTARY MATERIAL
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180129143
Publication date
May 10, 2018
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20180046089
Publication date
Feb 15, 2018
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170343904
Publication date
Nov 30, 2017
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170329240
Publication date
Nov 16, 2017
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170242347
Publication date
Aug 24, 2017
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170102621
Publication date
Apr 13, 2017
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170010545
Publication date
Jan 12, 2017
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SENSOR SYSTEM, SUBSTRATE HANDLING SYSTEM AND LITHOGRAPHIC APPARATUS
Publication number
20160370716
Publication date
Dec 22, 2016
ASML NETHERLANDS B.V.
Joeri LOF
G01 - MEASURING TESTING
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160299440
Publication date
Oct 13, 2016
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160282726
Publication date
Sep 29, 2016
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160282727
Publication date
Sep 29, 2016
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160274473
Publication date
Sep 22, 2016
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20160062248
Publication date
Mar 3, 2016
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150362844
Publication date
Dec 17, 2015
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150338748
Publication date
Nov 26, 2015
ASML NETHERLANDS B.V.
Christiaan Alexander HOOGENDAM
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150261102
Publication date
Sep 17, 2015
ASML NETHERLANDS B.V.
Joeri LOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of Calibrating a Reluctance Actuator Assembly, Reluctance Ac...
Publication number
20150234297
Publication date
Aug 20, 2015
ASML NETHERLANDS B.V.
Johannes Antonius Gerardus Akkermans
H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150168850
Publication date
Jun 18, 2015
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150070668
Publication date
Mar 12, 2015
ASML NETHERLANDS B.V.
Bob STREEFKERK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Backscatter Reduction in Thin Electron Detectors
Publication number
20140166879
Publication date
Jun 19, 2014
FEI Company
Michael Alwin William Stekelenburg
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20130301017
Publication date
Nov 14, 2013
ASML NETHERLANDS B.V.
Antonius Theodorus Anna Maria Derksen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY