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Joern Greif-Wuestenbecker
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Marburg, DE
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Patents Grants
last 30 patents
Information
Patent Grant
Imaging system for emulation of a high aperture scanning system
Patent number
7,535,640
Issue date
May 19, 2009
Carl Zeiss SMS GmbH
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Microscope imaging system and method for emulating a high aperture...
Patent number
7,286,284
Issue date
Oct 23, 2007
Carl Zeiss SMS GmbH
Michael Totzeck
G02 - OPTICS
Information
Patent Grant
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
Patent number
6,894,837
Issue date
May 17, 2005
Carl Zeiss Microelectric Systems GmbH
Hans-Juergen Dobschal
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Patents Applications
last 30 patents
Information
Patent Application
Polarizer device for generating a defined spatial distribution of p...
Publication number
20060028706
Publication date
Feb 9, 2006
Carl Zeiss SMT AG
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Microscope imaging system and method for emulating a high aperture...
Publication number
20060012873
Publication date
Jan 19, 2006
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Imaging system for emulation of a high aperture scanning system
Publication number
20060007541
Publication date
Jan 12, 2006
Michael Totzeck
G02 - OPTICS
Information
Patent Application
Imaging system for an extreme ultraviolet (EUV) beam-based microscope
Publication number
20040212891
Publication date
Oct 28, 2004
Hans-Juergen Dobschal
G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING