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Joern-Holger Franke
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Ukkel, BE
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last 30 patents
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Patent Grant
Extreme ultraviolet lithography device
Patent number
11,360,380
Issue date
Jun 14, 2022
Imec VZW
Joern-Holger Franke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Grant
Lithography scanner
Patent number
11,181,818
Issue date
Nov 23, 2021
Imec VZW
Emily Gallagher
D01 - NATURAL OR ARTIFICIAL THREADS OR FIBRES SPINNING
Patents Applications
last 30 patents
Information
Patent Application
Extreme Ultraviolet Lithography Device
Publication number
20210011370
Publication date
Jan 14, 2021
IMEC vzw
Joern-Holger Franke
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithography Scanner
Publication number
20200209737
Publication date
Jul 2, 2020
IMEC vzw
Emily Gallagher
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY