Joezf Petrus Henricus Benschop

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Veldhoven, NL

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Patents Grantslast 30 patents

Information Patent Grant
Dual stage lithographic apparatus and device manufacturing method
- Patent number RE44446
- Issue date Aug 20, 2013
- ASML Netherlands B.V.
- Marinus Aart Van Den Brink
- 355 - Photocopying