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Johan Gertrudis Cornelis Kunnen
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Weert, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method and system for determining overlay
Patent number
11,774,869
Issue date
Oct 3, 2023
ASML Netherlands B.V.
Ruud Hendrikus Martinus Johannes Bloks
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for decision making in a semiconductor manufacturing process
Patent number
11,687,007
Issue date
Jun 27, 2023
ASML Netherlands B.V.
Arnaud Hubaux
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
11,650,511
Issue date
May 16, 2023
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and method
Patent number
11,630,399
Issue date
Apr 18, 2023
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
RE49297
Issue date
Nov 15, 2022
ASML Netherlands B.V.
Hrishikesh Patel
Information
Patent Grant
Lithographic apparatus and an object positioning system
Patent number
RE49142
Issue date
Jul 19, 2022
ASML Netherlands B.V.
Adrianus Hendrik Koevoets
Information
Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
Patent number
11,300,890
Issue date
Apr 12, 2022
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
11,281,115
Issue date
Mar 22, 2022
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature sensing probe, burl plate, lithographic apparatus and m...
Patent number
RE48668
Issue date
Aug 3, 2021
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
Information
Patent Grant
Patterning device cooling apparatus
Patent number
10,990,025
Issue date
Apr 27, 2021
ASML Netherlands B.V.
Laurentius Johannes Adrianus Van Bokhoven
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
10,747,126
Issue date
Aug 18, 2020
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,591,828
Issue date
Mar 17, 2020
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,551,752
Issue date
Feb 4, 2020
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
Patent number
10,520,837
Issue date
Dec 31, 2019
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
10,324,382
Issue date
Jun 18, 2019
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Patterning device cooling systems in a lithographic apparatus
Patent number
10,281,830
Issue date
May 7, 2019
ASML Netherlands B.V.
Laurentius Johannes Adrianus Van Bokhoven
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Patterning device cooling apparatus
Patent number
10,222,713
Issue date
Mar 5, 2019
ASML Netherlands B.V.
Laurentius Johannes Adrianus Van Bokhoven
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
10,203,611
Issue date
Feb 12, 2019
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method
Patent number
10,191,377
Issue date
Jan 29, 2019
ASML Netherlands, B.V.
Hrishikesh Patel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
9,971,252
Issue date
May 15, 2018
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and an object positioning system
Patent number
9,939,738
Issue date
Apr 10, 2018
ASML Netherlands B.V.
Adrianus Hendrik Koevoets
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
Patent number
9,897,928
Issue date
Feb 20, 2018
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,823,589
Issue date
Nov 21, 2017
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
9,740,110
Issue date
Aug 22, 2017
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,632,435
Issue date
Apr 25, 2017
ASML Netherlands B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a device manufacturing method involving...
Patent number
9,618,858
Issue date
Apr 11, 2017
ASML Netherlands B.V.
Hrishikesh Patel
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Support table for a lithographic apparatus, lithographic apparatus...
Patent number
9,575,419
Issue date
Feb 21, 2017
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,298,107
Issue date
Mar 29, 2016
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Substrate table assembly, an immersion lithographic apparatus and a...
Patent number
9,280,063
Issue date
Mar 8, 2016
ASML Netherlands B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Temperature sensing probe, burl plate, lithographic apparatus and m...
Patent number
9,141,005
Issue date
Sep 22, 2015
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G01 - MEASURING TESTING
Patents Applications
last 30 patents
Information
Patent Application
OPERATING A METROLOGY SYSTEM, LITHOGRAPHIC APPARATUS, AND METHODS T...
Publication number
20240134289
Publication date
Apr 25, 2024
ASML NETHERLANDS B.V.
Bram Paul Theodoor VAN GOCH
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20230333482
Publication date
Oct 19, 2023
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20230280663
Publication date
Sep 7, 2023
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20230273533
Publication date
Aug 31, 2023
ASML NETHERLANDS B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE SUPPORT SYSTEM, LITHOGRAPHIC APPARATUS AND METHOD OF EXPO...
Publication number
20230176487
Publication date
Jun 8, 2023
ASML NETHERLANDS B.V.
Rogier Sebastiaan GILIJAMSE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20220206400
Publication date
Jun 30, 2022
ASML NETHERLANDS B.V.
Nicolaas TEN KATE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
A METHOD AND SYSTEM FOR DETERMINING OVERLAY
Publication number
20220171299
Publication date
Jun 2, 2022
ASML NETHERLANDS B.V.
Ruud Hendrikus Martinus Johannes BLOKS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
METHOD FOR DECISION MAKING IN A SEMICONDUCTOR MANUFACTURING PROCESS
Publication number
20220082949
Publication date
Mar 17, 2022
ASML NETHERLANDS B.V.
Arnaud HUBAUX
G05 - CONTROLLING REGULATING
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20200371447
Publication date
Nov 26, 2020
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20200142325
Publication date
May 7, 2020
ASML NETHERLANDS B.V.
Nicolaas Ten Kate
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
Publication number
20200124993
Publication date
Apr 23, 2020
AS ML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20190294056
Publication date
Sep 26, 2019
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE COOLING APPARATUS
Publication number
20190196345
Publication date
Jun 27, 2019
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20190171113
Publication date
Jun 6, 2019
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
PATTERNING DEVICE COOLING APPARATUS
Publication number
20180356740
Publication date
Dec 13, 2018
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, support table for a lithographic apparatus...
Publication number
20180284627
Publication date
Oct 4, 2018
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20180239265
Publication date
Aug 23, 2018
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PATTERNING DEVICE COOLING SYSTEMS IN A LITHOGRAPHIC APPARATUS
Publication number
20180196360
Publication date
Jul 12, 2018
ASML NETHERLANDS B.V.
Laurentius Johannes Adrianus VAN BOKHOVEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20180074411
Publication date
Mar 15, 2018
ASML NETHERLANDS B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20170351187
Publication date
Dec 7, 2017
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
A LITHOGRAPHIC APPARATUS AND AN OBJECT POSITIONING SYSTEM
Publication number
20170212429
Publication date
Jul 27, 2017
ASML NETHERLANDS B.V.
Adrianus Hendrik KOEVOETS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
Publication number
20170212421
Publication date
Jul 27, 2017
ASML NETHERLANDS B.V.
Hrishikesh PATEL
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20170176872
Publication date
Jun 22, 2017
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
Publication number
20160202618
Publication date
Jul 14, 2016
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20150277243
Publication date
Oct 1, 2015
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20130094005
Publication date
Apr 18, 2013
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
Publication number
20130045447
Publication date
Feb 21, 2013
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis Kunnen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SUBSTRATE TABLE ASSEMBLY, AN IMMERSION LITHOGRAPHIC APPARATUS AND A...
Publication number
20130038854
Publication date
Feb 14, 2013
ASML NETHERLANDS B.V.
Johan Gertrudis Cornelis KUNNEN
H01 - BASIC ELECTRIC ELEMENTS