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Johan Maria Van Boxmeer
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Saint Oedenrode, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method of determining an optimal focus height for a metrology appar...
Patent number
10,571,363
Issue date
Feb 25, 2020
ASML Netherlands B.V.
Mariya Vyacheslavivna Medvedyeva
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of optimizing the position and/or size of a measurement illu...
Patent number
10,488,765
Issue date
Nov 26, 2019
ASML Netherlands B.V.
Johan Maria Van Boxmeer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Scatterometer and lithographic apparatus
Patent number
8,994,921
Issue date
Mar 31, 2015
ASML Netherlands B.V.
Johan Maria Van Boxmeer
G01 - MEASURING TESTING
Information
Patent Grant
Inspection method and apparatus lithographic apparatus, lithographi...
Patent number
7,869,022
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Johan Maria Van Boxmeer
G02 - OPTICS
Information
Patent Grant
Lithographic apparatus, method of exposing a substrate, method of m...
Patent number
7,835,017
Issue date
Nov 16, 2010
ASML Netherlands B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF DETERMINING AN OPTIMAL FOCUS HEIGHT FOR A METROLOGY APPAR...
Publication number
20190242782
Publication date
Aug 8, 2019
ASML NETHERLANDS B.V.
Mariya Vyacheslavivna MEDVEDYEVA
G01 - MEASURING TESTING
Information
Patent Application
Method of Optimizing the Position and/or Size of a Measurement Illu...
Publication number
20190107786
Publication date
Apr 11, 2019
ASML NETHERLANDS B.V.
Johan Maria VAN BOXMEER
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SCATTEROMETER AND LITHOGRAPHIC APPARATUS
Publication number
20110261339
Publication date
Oct 27, 2011
ASML Netherlands B.V.
Johan Maria Van Boxmeer
G01 - MEASURING TESTING
Information
Patent Application
Focus Sensor, Inspection Apparatus, Lithographic Apparatus and Cont...
Publication number
20110102774
Publication date
May 5, 2011
ASML NETHERLANDS B.V.
Arnold Sinke
G02 - OPTICS
Information
Patent Application
Lithographic Apparatus, Method of Exposing a Substrate, Method of M...
Publication number
20070252963
Publication date
Nov 1, 2007
ASML NETHERLANDS B.V.
Theodorus Marinus Modderman
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY