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Johanes H. Sukamto
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Lake Oswego, OR, US
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last 30 patents
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Patent Grant
Sonic irradiation during wafer immersion
Patent number
7,727,863
Issue date
Jun 1, 2010
Novellus Systems, Inc.
Bryan L. Buckalew
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Patent Grant
Anneal of ruthenium seed layer to improve copper plating
Patent number
7,442,267
Issue date
Oct 28, 2008
Novellus Systems, Inc.
Eric G. Webb
C22 - METALLURGY FERROUS OR NON-FERROUS ALLOYS TREATMENT OF ALLOYS OR NON-FER...
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Patent Grant
Methods for the electrochemical deposition of copper onto a barrier...
Patent number
7,341,946
Issue date
Mar 11, 2008
Novellus Systems, Inc.
Sridhar K. Kailasam
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Methods for the electrochemical deposition of copper onto a barrier...
Publication number
20050098440
Publication date
May 12, 2005
Sridhar K. Kailasam
C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR