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Johannes Chiu
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Bedford, MA, US
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Patents Grants
last 30 patents
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Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
Patent number
11,733,224
Issue date
Aug 22, 2023
MKS Instruments, Inc.
Johannes Chiu
G01 - MEASURING TESTING
Information
Patent Grant
Multi-sensor gas sampling detection system for radical gases and sh...
Patent number
11,262,340
Issue date
Mar 1, 2022
MKS Instruments, Inc.
Johannes Chiu
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
Publication number
20220214321
Publication date
Jul 7, 2022
MKS Instruments, Inc.
Johannes Chiu
G01 - MEASURING TESTING
Information
Patent Application
Multi-Sensor Gas Sampling Detection System for Radical Gases and Sh...
Publication number
20190170715
Publication date
Jun 6, 2019
MKS Instruments
Johannes Chiu
G01 - MEASURING TESTING