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Johannes Christiaan Franken
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Knegsel, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
10,394,141
Issue date
Aug 27, 2019
ASML Netherlands B.V.
Michel Riepen
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Radiation source and lithographic apparatus
Patent number
9,753,383
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Michel Riepen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation source for an EUV optical lithographic apparatus, and lit...
Patent number
9,753,372
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Johannes Christiaan Leonardus Franken
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Conduit system for a lithographic apparatus, lithographic apparatus...
Patent number
8,976,332
Issue date
Mar 10, 2015
ASML Netherlands B.V.
Martinus Wilhelmus Van Den Heuvel
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Lithographic apparatus, a radiation system, a device manufacturing...
Patent number
8,736,806
Issue date
May 27, 2014
ASML Netherlands B.V.
Olav Waldemar Vladimir Frijns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and use of a r...
Patent number
7,897,941
Issue date
Mar 1, 2011
ASML Netherlands B.V.
Johannes Christiaan Leonardus Franken
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Apparatus comprising a rotating contaminant trap
Patent number
7,889,312
Issue date
Feb 15, 2011
ASML Netherlands B.V.
Johannes Christiaan Leonardus Franken
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Method for removal of deposition on an optical element, lithographi...
Patent number
7,868,304
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Levinus Pieter Bakker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation system and lithographic apparatus comprising the same
Patent number
7,863,591
Issue date
Jan 4, 2011
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G01 - MEASURING TESTING
Information
Patent Grant
Conduit system for a lithographic apparatus, lithographic apparatus...
Patent number
7,843,548
Issue date
Nov 30, 2010
ASML Netherlands B.V.
Martinus Wilhelmus Van Den Heuvel
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Grant
Device arranged to measure a quantity relating to radiation and lit...
Patent number
7,724,349
Issue date
May 25, 2010
ASML Netherlands B.V.
Wouter Anthon Soer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Radiation system and lithographic apparatus comprising the same
Patent number
7,541,603
Issue date
Jun 2, 2009
ASML Netherlands B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
G01 - MEASURING TESTING
Information
Patent Grant
Radiation source
Patent number
7,501,642
Issue date
Mar 10, 2009
ASML Netherlands B.V.
Johannes Hubertus Josephina Moors
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and use of a r...
Patent number
7,462,841
Issue date
Dec 9, 2008
ASML Netherlands B.V.
Johannes Christiaan Leonardus Franken
F24 - HEATING RANGES VENTILATING
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
7,098,994
Issue date
Aug 29, 2006
ASML Netherlands B.V.
Johannes Hubertus Josephina Moors
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Radiation Source and Lithographic Apparatus
Publication number
20170322499
Publication date
Nov 9, 2017
ASML NETHERLANDS B.V.
Michel RIEPEN
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
Radiation Source for an EUV Optical Lithographic Apparatus, and Lit...
Publication number
20160147160
Publication date
May 26, 2016
ASML NETHERLANDS B.V.
Johannes Christiaan Leonardus FRANKEN
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radiation Collector, Radiation Source and Lithographic Apparatus
Publication number
20160041374
Publication date
Feb 11, 2016
ASML NETHERLANDS B.V.
Ivo VANDERHALLEN
G02 - OPTICS
Information
Patent Application
Radiation Source and Lithographic Apparatus
Publication number
20150338753
Publication date
Nov 26, 2015
ASML NETHERLANDS B.V.
Michel RIEPEN
F15 - FLUID-PRESSURE ACTUATORS HYDRAULICS OR PNEUMATICS IN GENERAL
Information
Patent Application
Lithographic Apparatus, a Radiation System, a Device Manufacturing...
Publication number
20110242516
Publication date
Oct 6, 2011
ASML NETHERLANDS B.V.
Olav Waldemar Vladimir Frijns
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
APPARATUS COMPRISING A ROTATING CONTAMINANT TRAP
Publication number
20110096308
Publication date
Apr 28, 2011
ASML NETHERLANDS B.V.
Johannes Christiaan Leonardus FRANKEN
B82 - NANO-TECHNOLOGY
Information
Patent Application
CONDUIT SYSTEM FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATUS...
Publication number
20110032497
Publication date
Feb 10, 2011
ASML NETHERLANDS B.V.
Martinus Wilhelmus VAN DEN HEUVEL
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Apparatus comprising a rotating contaminant trap
Publication number
20100259733
Publication date
Oct 14, 2010
ASML NETHERLANDS B.V.
Johannes Christiaan Franken
B82 - NANO-TECHNOLOGY
Information
Patent Application
Radiation System and Lithographic Apparatus Comprising the Same
Publication number
20090309048
Publication date
Dec 17, 2009
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus VAN HERPEN
G01 - MEASURING TESTING
Information
Patent Application
Lithographic apparatus, device manufacturing method, and use of a r...
Publication number
20090066924
Publication date
Mar 12, 2009
ASML NETHERLANDS B.V.
Johannes Christiaan Leonardus Franken
F24 - HEATING RANGES VENTILATING
Information
Patent Application
Device arranged to measure a quantity relating to radiation and lit...
Publication number
20080273188
Publication date
Nov 6, 2008
ASML NETHERLANDS B.V.
Wouter Anthon Soer
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Conduit system for a lithographic apparatus, lithographic apparatus...
Publication number
20080143001
Publication date
Jun 19, 2008
ASML NETHERLANDS B.V.
Martinus Wilhelmus Van Den Heuvel
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information
Patent Application
Radiation source
Publication number
20070152175
Publication date
Jul 5, 2007
ASML NETHERLANDS B.V.
Johannes Hubertus Josephina Moors
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR