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Johannes Heintze
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Lithographic apparatus, source, source controller and control method
Patent number
7,868,999
Issue date
Jan 11, 2011
ASML Netherlands B.V.
Johannes Heintze
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, illumination system, illumination controlle...
Patent number
7,297,911
Issue date
Nov 20, 2007
ASML Netherlands B.V.
Stefan Geerte Kruijswijk
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus, device manufacturing method, performance me...
Patent number
7,057,705
Issue date
Jun 6, 2006
ASML Netherlands B.V.
Johannes Heintze
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Modulated lithographic beam to reduce sensitivity to fluctuating sc...
Patent number
7,016,013
Issue date
Mar 21, 2006
ASML Netherlands B.V.
Petrus Marinus Christianus Maria Van Der Biggelaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Lithographic apparatus, source, source controller and control method
Publication number
20080036991
Publication date
Feb 14, 2008
ASML NETHERLANDS B.V.
Johannes Heintze
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, illumination system, illumination controlle...
Publication number
20070018071
Publication date
Jan 25, 2007
ASML NETHERLANDS B.V.
Stefan Geerte Kruijswijk
G01 - MEASURING TESTING
Information
Patent Application
Modulated lithographic beam to reduce sensitivity to fluctuating sc...
Publication number
20050151946
Publication date
Jul 14, 2005
ASML NETHERLANDS B.V.
Petrus Marinus Christianus Maria Van Der Biggelaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method, performance me...
Publication number
20040021840
Publication date
Feb 5, 2004
ASML NETHERLANDS, B.V.
Johannes Heintze
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY