Johannes Henricus Wilhelmus Jacobs

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,259,287
- Issue date Sep 4, 2012
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid filtration method, fluid filtered thereby, lithographic appar...
- Patent number 8,246,838
- Issue date Aug 21, 2012
- ASML Netherlands B.V.
- Martinus Cornelis Maria Verhagen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Lithographic apparatus and substrate edge seal
- Patent number 8,232,540
- Issue date Jul 31, 2012
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and apparatus f...
- Patent number 8,107,053
- Issue date Jan 31, 2012
- ASML Netherlands B.V.
- Martinus Cornelis Maria Verhagen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, control system and device manufacturing method
- Patent number 8,045,134
- Issue date Oct 25, 2011
- ASML Netherlands B.V.
- Marcus Adrianus Van De Kerkhof
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,018,573
- Issue date Sep 13, 2011
- ASML Netherlands B.V.
- Marco Koert Stavenga
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and substrate edge seal
- Patent number 8,003,968
- Issue date Aug 23, 2011
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,004,654
- Issue date Aug 23, 2011
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device and device manufacturing method
- Patent number 7,924,403
- Issue date Apr 12, 2011
- ASML Netherlands B.V.
- Paulus Martinus Maria Liebregts
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid filtration method, fluid filtered thereby, lithographic appar...
- Patent number 7,914,687
- Issue date Mar 29, 2011
- ASML Netherlands B.V.
- Martinus Cornelis Maria Verhagen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Lithographic apparatus and device manufacturing method having liqui...
- Patent number 7,804,575
- Issue date Sep 28, 2010
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,751,027
- Issue date Jul 6, 2010
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and method of c...
- Patent number 7,746,447
- Issue date Jun 29, 2010
- ASML Netherlands B.V.
- Koen Jacobus Johannes Maria Zaal
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,733,459
- Issue date Jun 8, 2010
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- C02 - TREATMENT OF WATER, WASTE WATER, SEWAGE, OR SLUDGE
Information Patent Grant
Lithographic device, device manufacturing method and device manufac...
- Patent number 7,684,012
- Issue date Mar 23, 2010
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,652,746
- Issue date Jan 26, 2010
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,502,095
- Issue date Mar 10, 2009
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and apparatus f...
- Patent number 7,428,038
- Issue date Sep 23, 2008
- ASML Netherlands B.V.
- Martinus Cornelis Maria Verhagen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 7,423,721
- Issue date Sep 9, 2008
- ASML Netherlands B.V.
- Antonius Johannes Josephus Van Dijsseldonk
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and substrate edge seal
- Patent number 7,420,194
- Issue date Sep 2, 2008
- ASML Netherlands B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,411,658
- Issue date Aug 12, 2008
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,411,654
- Issue date Aug 12, 2008
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid filtration method, fluid filtered thereby, lithographic appar...
- Patent number 7,378,025
- Issue date May 27, 2008
- ASML Netherlands B.V.
- Martinus Cornelis Maria Verhagen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,361,911
- Issue date Apr 22, 2008
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic projection apparatus and device manufacturing method
- Patent number 7,274,431
- Issue date Sep 25, 2007
- ASML Netherlands B.V.
- Wilhelmus Josephus Box
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sealing assembly, a lithographic projection apparatus, and a device...
- Patent number 7,256,863
- Issue date Aug 14, 2007
- ASML Netherlands B.V.
- Barrie Dudley Brewster
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,251,013
- Issue date Jul 31, 2007
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,133,114
- Issue date Nov 7, 2006
- ASML Netherlands B.V.
- Christiaan Alexander Hoogendam
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 7,126,664
- Issue date Oct 24, 2006
- ASML Netherlands B.V.
- Bernardus Antonius Johannes Luttikhuis
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20120242969
- Publication date Sep 27, 2012
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120113402
- Publication date May 10, 2012
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND APPARATUS F...
- Publication number 20120097034
- Publication date Apr 26, 2012
- ASML NETHERLANDS B.V.
- Martinus Cornelis Maria VERHAGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013870
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120013874
- Publication date Jan 19, 2012
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120008118
- Publication date Jan 12, 2012
- ASML NETHERLANDS B.V.
- Marcel BECKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20120008116
- Publication date Jan 12, 2012
- ASML NETERLANDS B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPONENT OF AN IMMERSION SYSTEM, AN IMMERSION LITHOGRAPHIC APPARAT...
- Publication number 20110287371
- Publication date Nov 24, 2011
- ASML NETHERLANDS B.V.
- Nina Vladimirovna DZIOMKINA
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110273695
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110273679
- Publication date Nov 10, 2011
- ASML NETHERLANDS B.V.
- Thijs Egidius Johannes KNAAPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEAT PIPE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110232878
- Publication date Sep 29, 2011
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus Jacobs
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20110222032
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20110222033
- Publication date Sep 15, 2011
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20110181849
- Publication date Jul 28, 2011
- ASML NETHERLANDS B.V.
- Hrishikesh PATEL
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID FILTRATION METHOD, FLUID FILTERED THEREBY, LITHOGRAPHIC APPAR...
- Publication number 20110136064
- Publication date Jun 9, 2011
- ASML NETHERLANDS B.V.
- Martinus Cornelis Maria Verhagen
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110128517
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Joost Jeroen Ottens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
HEAT PIPE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110075118
- Publication date Mar 31, 2011
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus JACOBS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...
- Publication number 20110005603
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Hrishikesh Patel
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20110007287
- Publication date Jan 13, 2011
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus JACOBS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100321650
- Publication date Dec 23, 2010
- ASML NETHERLANDS B.V.
- THEODORUS PETRUS MARIA CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20100302518
- Publication date Dec 2, 2010
- ASML NETHERLANDS B.V.
- Jan VAN EIJK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100265476
- Publication date Oct 21, 2010
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie Dierichs
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100245791
- Publication date Sep 30, 2010
- Johannes Henricus Wilhelmus JACOBS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20100157260
- Publication date Jun 24, 2010
- ASML NETHERLANDS B.V.
- Thijs Egidius Johannes KNAAPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND HUMIDITY MEASUREMENT SYSTEM
- Publication number 20100085546
- Publication date Apr 8, 2010
- ASML NETHERLANDS B.V.
- Leon VAN DOOREN
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS, A METROLOGY APPARATUS AND A METHOD OF USING...
- Publication number 20100014060
- Publication date Jan 21, 2010
- ASML NETHERLANDS B.V.
- Axel Sebastiaan Lexmond
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT STRUCTURE, LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20090290137
- Publication date Nov 26, 2009
- ASML NETHERLANDS B.V.
- Marcus Martinus Petrus Adrianus VERMEULEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS
- Publication number 20090284715
- Publication date Nov 19, 2009
- ASML Netherland B.V.
- Robert Douglas Watso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20090279061
- Publication date Nov 12, 2009
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus JACOBS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND APPARATUS F...
- Publication number 20080314249
- Publication date Dec 25, 2008
- ASML NETHERLANDS B.V.
- Martinus Cornelis Maria VERHAGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Johannes Henricus Wilhelmus Jacobs

Person

Patents Grantslast 30 patents

Lithographic apparatus and device manufacturing method

Fluid filtration method, fluid filtered thereby, lithographic appar...

Lithographic apparatus and substrate edge seal

Lithographic apparatus, device manufacturing method and apparatus f...

Lithographic apparatus, control system and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and substrate edge seal

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device and device manufacturing method

Fluid filtration method, fluid filtered thereby, lithographic appar...

Lithographic apparatus and device manufacturing method having liqui...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method and method of c...

Lithographic apparatus and device manufacturing method

Lithographic device, device manufacturing method and device manufac...

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Lithographic apparatus, device manufacturing method and apparatus f...

Lithographic apparatus

Lithographic apparatus and substrate edge seal

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Fluid filtration method, fluid filtered thereby, lithographic appar...

Lithographic apparatus and device manufacturing method

Lithographic projection apparatus and device manufacturing method

Sealing assembly, a lithographic projection apparatus, and a device...

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and a device manufacturing method

Patents Applicationslast 30 patents

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND APPARATUS F...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

COMPONENT OF AN IMMERSION SYSTEM, AN IMMERSION LITHOGRAPHIC APPARAT...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

HEAT PIPE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

FLUID FILTRATION METHOD, FLUID FILTERED THEREBY, LITHOGRAPHIC APPAR...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

HEAT PIPE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFAC...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND HUMIDITY MEASUREMENT SYSTEM

LITHOGRAPHIC APPARATUS, A METROLOGY APPARATUS AND A METHOD OF USING...

SUPPORT STRUCTURE, LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND A METHOD OF OPERATING THE APPARATUS

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND APPARATUS F...