Johannes Henricus Wilhelmus Jacobs

Person

Heeze, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,846,887
- Issue date Dec 19, 2023
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,630,399
- Issue date Apr 18, 2023
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number RE49297
- Issue date Nov 15, 2022
- ASML Netherlands B.V.
- Hrishikesh Patel
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 11,378,893
- Issue date Jul 5, 2022
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Prolonging optical element lifetime in an EUV lithography system
- Patent number 11,340,532
- Issue date May 24, 2022
- ASML Netherlands B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 11,300,890
- Issue date Apr 12, 2022
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 11,281,115
- Issue date Mar 22, 2022
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,838,310
- Issue date Nov 17, 2020
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,747,125
- Issue date Aug 18, 2020
- ASML Netherlands B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 10,551,752
- Issue date Feb 4, 2020
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 10,520,837
- Issue date Dec 31, 2019
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,495,984
- Issue date Dec 3, 2019
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 10,481,502
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method involving a...
- Patent number 10,254,663
- Issue date Apr 9, 2019
- ASML Netherlands B.V.
- Theodorus Petrus Maria Cadee
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,209,629
- Issue date Feb 19, 2019
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal conditioning unit, lithographic apparatus and device manufa...
- Patent number 10,191,395
- Issue date Jan 29, 2019
- ASML Neatherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method
- Patent number 10,191,377
- Issue date Jan 29, 2019
- ASML Netherlands, B.V.
- Hrishikesh Patel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a method of operating the apparatus
- Patent number 10,175,585
- Issue date Jan 8, 2019
- ASML Netherlands B.V.
- Robert Douglas Watso
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Support apparatus, lithographic apparatus and device manufacturing...
- Patent number 10,120,292
- Issue date Nov 6, 2018
- ASML Netherlands, B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,971,254
- Issue date May 15, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,915,877
- Issue date Mar 13, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, support table for a lithographic apparatus...
- Patent number 9,897,928
- Issue date Feb 20, 2018
- ASML Netherlands B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Thermal conditioning unit, lithographic apparatus and device manufa...
- Patent number 9,891,541
- Issue date Feb 13, 2018
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,857,695
- Issue date Jan 2, 2018
- ASML Netherlands B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,785,055
- Issue date Oct 10, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Sensor, lithographic apparatus and device manufacturing method
- Patent number 9,753,382
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus
- Patent number 9,696,638
- Issue date Jul 4, 2017
- ASML Netherlands B.V.
- Engelbertus Antonius Fransiscus Van Der Pasch
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and method
- Patent number 9,632,435
- Issue date Apr 25, 2017
- ASML Netherlands B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and a device manufacturing method involving...
- Patent number 9,618,858
- Issue date Apr 11, 2017
- ASML Netherlands B.V.
- Hrishikesh Patel
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,581,914
- Issue date Feb 28, 2017
- ASML Netherlands B.V.
- Marcel Mathijs Theodore Marie Dierichs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
TEMPERATURE CONDITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A MET...
- Publication number 20240176255
- Publication date May 30, 2024
- ASML NETHERLANDS B.V.
- Remco VAN DE MEERENDONK
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20240160109
- Publication date May 16, 2024
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
CONDITIONING APPARATUS AND METHOD
- Publication number 20230400785
- Publication date Dec 14, 2023
- ASML NETHERLANDS B.V.
- Antonius Johannus VAN DER NET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20230273533
- Publication date Aug 31, 2023
- ASML NETHERLANDS B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...
- Publication number 20230063156
- Publication date Mar 2, 2023
- ASML Holding N.V.
- Ronald Peter ALBRIGHT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20220291591
- Publication date Sep 15, 2022
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20220206400
- Publication date Jun 30, 2022
- ASML NETHERLANDS B.V.
- Nicolaas TEN KATE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM
- Publication number 20210109452
- Publication date Apr 15, 2021
- ASML NETHERLANDS B.V.
- Yue Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20210063898
- Publication date Mar 4, 2021
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND METHOD
- Publication number 20200142325
- Publication date May 7, 2020
- ASML NETHERLANDS B.V.
- Nicolaas Ten Kate
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...
- Publication number 20200124993
- Publication date Apr 23, 2020
- AS ML NETHERLANDS B.V.
- Johan Gertrudis Cornelis KUNNEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...
- Publication number 20190235397
- Publication date Aug 1, 2019
- ASML NETHERLANDS B.V.
- Theodorus Petrus Maria CADEE
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20190179232
- Publication date Jun 13, 2019
- ASML NETHERLANDS B.V.
- Marcel BECKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20190072863
- Publication date Mar 7, 2019
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus, support table for a lithographic apparatus...
- Publication number 20180284627
- Publication date Oct 4, 2018
- ASML NETHERLANDS B.V.
- Johan Gertrudis Cornelis Kunnen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20180267412
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20180164704
- Publication date Jun 14, 2018
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus JACOBS
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170363964
- Publication date Dec 21, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20170315454
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD
- Publication number 20170212421
- Publication date Jul 27, 2017
- ASML NETHERLANDS B.V.
- Hrishikesh PATEL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170139333
- Publication date May 18, 2017
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie DIERICHS
- B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20170090304
- Publication date Mar 30, 2017
- ASML NETHERLANDS B.V.
- Raymond Wilhelmus Louis Lafarre
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20160370713
- Publication date Dec 22, 2016
- ASML NETHERLANDS B.V.
- Marcel Beckers
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS
- Publication number 20160109812
- Publication date Apr 21, 2016
- ASML NETHERLANDS B.V.
- Engelbertus Antonius Fransiscus VAN DER PASCH
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150309420
- Publication date Oct 29, 2015
- ASML NETHERLANDS B.V.
- Marcel BECKERS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150205214
- Publication date Jul 23, 2015
- ASML NETHERLANDS B.V.
- Marcel Mathijs Theodore Marie DIERICHS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20150131064
- Publication date May 14, 2015
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...
- Publication number 20150109599
- Publication date Apr 23, 2015
- ASML NETHERLANDS B.V.
- Adrianus Hendrik Koevoets
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20150077728
- Publication date Mar 19, 2015
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...
- Publication number 20150070666
- Publication date Mar 12, 2015
- ASML NETHERLANDS B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Johannes Henricus Wilhelmus Jacobs

Person

Patents Grantslast 30 patents

Prolonging optical element lifetime in an EUV lithography system

Lithographic apparatus and method

Lithographic apparatus and a device manufacturing method

Lithographic apparatus and device manufacturing method involving a...

Prolonging optical element lifetime in an EUV lithography system

Lithographic apparatus, support table for a lithographic apparatus...

Lithographic apparatus and method

Lithographic apparatus and device manufacturing method involving a...

Support apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus and method

Lithographic apparatus, support table for a lithographic apparatus...

Lithographic apparatus and device manufacturing method

Object holder and lithographic apparatus

Lithographic apparatus and device manufacturing method involving a...

Lithographic apparatus and device manufacturing method

Thermal conditioning unit, lithographic apparatus and device manufa...

Lithographic apparatus and a device manufacturing method

Lithographic apparatus and a method of operating the apparatus

Support apparatus, lithographic apparatus and device manufacturing...

Sensor, lithographic apparatus and device manufacturing method

Object holder and lithographic apparatus

Lithographic apparatus, support table for a lithographic apparatus...

Thermal conditioning unit, lithographic apparatus and device manufa...

Lithographic apparatus and device manufacturing method

Object holder and lithographic apparatus

Sensor, lithographic apparatus and device manufacturing method

Lithographic apparatus

Lithographic apparatus and method

Lithographic apparatus and a device manufacturing method involving...

Lithographic apparatus and device manufacturing method

Patents Applicationslast 30 patents

TEMPERATURE CONDITIONING SYSTEM, A LITHOGRAPHIC APPARATUS AND A MET...

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

CONDITIONING APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC SYSTEM PROVIDED WITH A DEFLECTION APPARATUS FOR CHANGI...

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

LITHOGRAPHIC APPARATUS AND METHOD

PROLONGING OPTICAL ELEMENT LIFETIME IN AN EUV LITHOGRAPHY SYSTEM

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND METHOD

LITHOGRAPHIC APPARATUS, SUPPORT TABLE FOR A LITHOGRAPHIC APPARATUS...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD INVOLVING A...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

Lithographic apparatus, support table for a lithographic apparatus...

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND A DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

SUPPORT APPARATUS, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING...

SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

THERMAL CONDITIONING UNIT, LITHOGRAPHIC APPARATUS AND DEVICE MANUFA...