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Johannes Hubertus Josephina Moors
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Helmond, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Method for removing a contamination layer from an optical surface a...
Patent number
8,419,862
Issue date
Apr 16, 2013
Carl Zeiss SMT GmbH
Dirk Heinrich Ehm
B08 - CLEANING
Information
Patent Grant
Radiation source, lithographic apparatus and device manufacturing m...
Patent number
8,373,846
Issue date
Feb 12, 2013
ASML Netherlands B.V.
Erik Roelof Loopstra
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Patents Applications
last 30 patents
Information
Patent Application
TARGET MATERIAL, A SOURCE, AN EUV LITHOGRAPHIC APPARATUS AND A DEVI...
Publication number
20110043777
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Vladimir Mihailovitc Krivtsun
H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information
Patent Application
Extreme ultra-violet lithographic apparatus and device manufacturin...
Publication number
20080302980
Publication date
Dec 11, 2008
ASML NETHERLANDS B.V.
Jan Bernard Plechelmus Van Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, system and device manufacturing method
Publication number
20070146660
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Marc Hubertus Lorenz Van Der Velden
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Radical cleaning arrangement for a lithographic apparatus
Publication number
20070145295
Publication date
Jun 28, 2007
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for removal of deposition on an optical element, lithographi...
Publication number
20060175558
Publication date
Aug 10, 2006
ASML NETHERLANDS B.V.
Levinus Pieter Bakker
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20060127811
Publication date
Jun 15, 2006
ASML NETHERLANDS B.V.
Johannes Hubertus Josephina Moors
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method for the removal of deposition on an optical element, method...
Publication number
20060115771
Publication date
Jun 1, 2006
ASML NETHERLANDS B.V.
Maarten Marinus Johannes Wilhelmus Van Herpen
B08 - CLEANING
Information
Patent Application
Lithographic apparatus and device manufacturing method
Publication number
20050254029
Publication date
Nov 17, 2005
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device manufacturing method, device manufactured thereby and a mask...
Publication number
20050146703
Publication date
Jul 7, 2005
ASML NETHERLANDS B.V.
Jan Evert Van Der Werf
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus having a debris-mitigation system, a source...
Publication number
20050140945
Publication date
Jun 30, 2005
ASML NETHERLANDS B.V.
Vadim Yevgenyevich Banine
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, device manufacturing method and device manu...
Publication number
20050057734
Publication date
Mar 17, 2005
ASML NETHERLANDS B.V.
Lucas Henricus Johannes Stevens
B08 - CLEANING