Johannes Hubertus Josephina Moors

Person

Helmond, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Optical element, lithographic apparatus including such an optical e...
- Patent number 8,345,223
- Issue date Jan 1, 2013
- ASML Netherlands B.V.
- Wouter Anthon Soer
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus comprising an electrical discharge generator...
- Patent number 8,317,929
- Issue date Nov 27, 2012
- ASML Netherlands B.V.
- Tatyana Victorovna Rakhimova
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for removing contamination on optical surfaces and optical a...
- Patent number 8,279,397
- Issue date Oct 2, 2012
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Illumination system and filter system
- Patent number 8,269,179
- Issue date Sep 18, 2012
- ASML Netherlands B.V.
- Arnoud Cornelis Wassink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for detecting at least one contamination species...
- Patent number 8,217,347
- Issue date Jul 10, 2012
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G01 - MEASURING TESTING
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,094,288
- Issue date Jan 10, 2012
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical arrangement and EUV lithography device with at least one he...
- Patent number 7,959,310
- Issue date Jun 14, 2011
- Carl Zeiss SMT GmbH
- Dirk Heinrich Ehm
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Optical apparatus, lithographic apparatus and device manufacturing...
- Patent number 7,935,218
- Issue date May 3, 2011
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 7,928,412
- Issue date Apr 19, 2011
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for detecting at least one contamination species...
- Patent number 7,897,110
- Issue date Mar 1, 2011
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G01 - MEASURING TESTING
Information Patent Grant
Method for removal of deposition on an optical element, lithographi...
- Patent number 7,868,304
- Issue date Jan 11, 2011
- ASML Netherlands B.V.
- Levinus Pieter Bakker
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultra-violet lithographic apparatus and device manufacturin...
- Patent number 7,816,658
- Issue date Oct 19, 2010
- ASML Netherlands B.V.
- Jan Bernard Plechelmus Van Schoot
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radical cleaning arrangement for a lithographic apparatus
- Patent number 7,812,330
- Issue date Oct 12, 2010
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Assembly for detection of radiation flux and contamination of an op...
- Patent number 7,800,079
- Issue date Sep 21, 2010
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Optical system for radiation in the EUV-wavelength range and method...
- Patent number 7,763,870
- Issue date Jul 27, 2010
- Carl Zeiss SMT AG
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,714,306
- Issue date May 11, 2010
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic device, device manufacturing method and device manufac...
- Patent number 7,684,012
- Issue date Mar 23, 2010
- ASML Netherlands B.V.
- Johannes Henricus Wilhelmus Jacobs
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Cleaning method, apparatus and cleaning system
- Patent number 7,671,347
- Issue date Mar 2, 2010
- ASML Netherlands B.V.
- Dirk Heinrich Ehm
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Multi-layer spectral purity filter, lithographic apparatus includin...
- Patent number 7,639,418
- Issue date Dec 29, 2009
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, and device manufacturing method
- Patent number 7,629,594
- Issue date Dec 8, 2009
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and cleaning method therefor
- Patent number 7,598,503
- Issue date Oct 6, 2009
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 7,515,245
- Issue date Apr 7, 2009
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,508,487
- Issue date Mar 24, 2009
- ASML Netherlands B.V.
- Johannes Catharinus Hubertus Mulkens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radiation source
- Patent number 7,501,642
- Issue date Mar 10, 2009
- ASML Netherlands B.V.
- Johannes Hubertus Josephina Moors
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Device manufacturing method, device manufactured thereby and a mask...
- Patent number 7,492,443
- Issue date Feb 17, 2009
- ASML Netherlands B.V.
- Jan Evert Van Der Werf
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, system and device manufacturing method
- Patent number 7,491,951
- Issue date Feb 17, 2009
- ASML Netherlands B.V.
- Marc Hubertus Lorenz Van Der Velden
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, illumination system, filter system and meth...
- Patent number 7,485,881
- Issue date Feb 3, 2009
- ASML Netherlands B.V.
- Arnoud Cornelis Wassink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Getter and cleaning arrangement for a lithographic apparatus and me...
- Patent number 7,473,908
- Issue date Jan 6, 2009
- ASML Netherlands B.V.
- Maarten Marinus Johannes Wilhelmus Van Herpen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Radical cleaning arrangement for a lithographic apparatus
- Patent number 7,462,850
- Issue date Dec 9, 2008
- ASML Netherlands B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
- Patent number 7,459,690
- Issue date Dec 2, 2008
- ASML Netherlands B.V.
- Jan Evert Van Der Werf
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Radiation Source, Lithographic Apparatus and Device Manufacturing M...
- Publication number 20120295205
- Publication date Nov 22, 2012
- ASML NETHERLANDS B.V.
- Antonius Theodorus Wilhelmus Kempen
- B08 - CLEANING
Information Patent Application
THERMAL CONDITIONING SYSTEM FOR THERMAL CONDITIONING A PART OF A LI...
- Publication number 20120267550
- Publication date Oct 25, 2012
- ASML NETHERLANDS B.V.
- Sjoerd Nicolaas Lambertus DONDERS
- F28 - HEAT EXCHANGE IN GENERAL
Information Patent Application
System and Method for Detecting at Least One Contamination Species...
- Publication number 20120241610
- Publication date Sep 27, 2012
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- G01 - MEASURING TESTING
Information Patent Application
OPTICAL ELEMENT FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATU...
- Publication number 20110249243
- Publication date Oct 13, 2011
- ASML NETHERLANDS B.V.
- Leonid Aizikovitch Sjmaenok
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...
- Publication number 20110188014
- Publication date Aug 4, 2011
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY
- Publication number 20110188011
- Publication date Aug 4, 2011
- Carl Zeiss SMT GMBH
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY
Information Patent Application
RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING...
- Publication number 20110143269
- Publication date Jun 16, 2011
- ASML NETHERLANDS B.V.
- Andrei Mikhailovich Yakunin
- G02 - OPTICS
Information Patent Application
Lithographic Apparatus and Method of Manufacturing an Electrostatic...
- Publication number 20110126406
- Publication date Jun 2, 2011
- ASML NETHERLANDS B.V.
- Hubert Adriaan VAN MIERLO
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
System and Method for Detecting at Least One Contamination Species...
- Publication number 20110121177
- Publication date May 26, 2011
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich BANINE
- G01 - MEASURING TESTING
Information Patent Application
LITHOGRAPHIC APPARATUS AND CONTAMINATION DETECTION METHOD
- Publication number 20110090495
- Publication date Apr 21, 2011
- ASML NETHERLANDS B.V.
- Anastasius Jacobus Anicetus Bruinsma
- G01 - MEASURING TESTING
Information Patent Application
MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS
- Publication number 20110080573
- Publication date Apr 7, 2011
- ASML NETHERLANDS B.V.
- Denis Alexandrovich Glushkov
- B82 - NANO-TECHNOLOGY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...
- Publication number 20110037960
- Publication date Feb 17, 2011
- ASML NETHERLANDS B.V.
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS COMPRISING AN INTERNAL SENSOR AND A MINI-REA...
- Publication number 20110037961
- Publication date Feb 17, 2011
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL E...
- Publication number 20110019174
- Publication date Jan 27, 2011
- Wouter Anthon Soer
- G02 - OPTICS
Information Patent Application
RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS
- Publication number 20110013166
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Erik Roelof Loopstra
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LITHOGRAPHIC APPARATUS COMPRISING A MAGNET, METHOD FOR THE PROTECTI...
- Publication number 20110013157
- Publication date Jan 20, 2011
- ASML NETHERLANDS B.V.
- Johannes Hubertus Josephina Moors
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, A PROJECTION SYSTEM AND A DEVICE MANUFACTUR...
- Publication number 20100309447
- Publication date Dec 9, 2010
- ASML NETHERLANDS B.V.
- Yuri Johannes Gabriel Van de Vijver
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Method for removing a contamination layer from an optical surface a...
- Publication number 20100288302
- Publication date Nov 18, 2010
- Dirk Heinrich Ehm
- B08 - CLEANING
Information Patent Application
System for Contactless Cleaning, Lithographic Apparatus and Device...
- Publication number 20100151394
- Publication date Jun 17, 2010
- Luigi Scaccabarozzi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
APPARATUS AND METHOD FOR MEASURING THE OUTGASSING AND EUV LITHOGRAP...
- Publication number 20100112494
- Publication date May 6, 2010
- Carl Zeiss SMT AG
- Dieter Kraus
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
SOURCE MODULE, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
- Publication number 20100085547
- Publication date Apr 8, 2010
- ASML NETHERLANDS B.V.
- Dzmitry Labetski
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
RADIATION SOURCE AND LITHOGRAPHIC APPARATUS
- Publication number 20100053581
- Publication date Mar 4, 2010
- ASML NETHERLANDS B.V.
- Gerardus Hubertus Petrus Maria SWINKELS
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
METHOD FOR REMOVING CONTAMINATION ON OPTICAL SURFACES AND OPTICAL A...
- Publication number 20090314931
- Publication date Dec 24, 2009
- Carl Zeiss SMT AG
- Dirk Heinrich EHM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...
- Publication number 20090231707
- Publication date Sep 17, 2009
- Carl Zeiss SMT AG
- Dirk Heinrich EHM
- B82 - NANO-TECHNOLOGY
Information Patent Application
Lithographic Apparatus, and Device Manufacturing Method
- Publication number 20090173360
- Publication date Jul 9, 2009
- ASML NETHERLANDS B.V.
- Maarten Marinus Johannes Wilhelmus VAN HERPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Illumination system and filter system
- Publication number 20090115980
- Publication date May 7, 2009
- ASML NETHERLANDS B.V.
- Arnoud Cornelis Wassink
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION
- Publication number 20090090877
- Publication date Apr 9, 2009
- ASML NETHERLANDS B.V.
- Tjarko Adriaan Rudolf Van Empel
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
Radical cleaning arrangement for a lithographic apparatus
- Publication number 20090072168
- Publication date Mar 19, 2009
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD...
- Publication number 20080315134
- Publication date Dec 25, 2008
- Carl Zeiss SMT AG
- Dirk Heinrich EHM
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Lithographic apparatus and device manufacturing method
- Publication number 20080259298
- Publication date Oct 23, 2008
- ASML NETHERLANDS B.V.
- Vadim Yevgenyevich Banine
- B82 - NANO-TECHNOLOGY

Johannes Hubertus Josephina Moors

Person

Patents Grantslast 30 patents

Optical element, lithographic apparatus including such an optical e...

Lithographic apparatus comprising an electrical discharge generator...

Method for removing contamination on optical surfaces and optical a...

Illumination system and filter system

System and method for detecting at least one contamination species...

Lithographic apparatus and device manufacturing method

Optical arrangement and EUV lithography device with at least one he...

Optical apparatus, lithographic apparatus and device manufacturing...

Lithographic apparatus, and device manufacturing method

System and method for detecting at least one contamination species...

Method for removal of deposition on an optical element, lithographi...

Extreme ultra-violet lithographic apparatus and device manufacturin...

Radical cleaning arrangement for a lithographic apparatus

Assembly for detection of radiation flux and contamination of an op...

Optical system for radiation in the EUV-wavelength range and method...

Lithographic apparatus and device manufacturing method

Lithographic device, device manufacturing method and device manufac...

Cleaning method, apparatus and cleaning system

Multi-layer spectral purity filter, lithographic apparatus includin...

Lithographic apparatus, and device manufacturing method

Lithographic apparatus and cleaning method therefor

Lithographic apparatus and device manufacturing method

Lithographic apparatus, device manufacturing method, and device man...

Radiation source

Device manufacturing method, device manufactured thereby and a mask...

Lithographic apparatus, system and device manufacturing method

Lithographic apparatus, illumination system, filter system and meth...

Getter and cleaning arrangement for a lithographic apparatus and me...

Radical cleaning arrangement for a lithographic apparatus

Lithographic apparatus, device manufacturing method, and device man...

Patents Applicationslast 30 patents

Radiation Source, Lithographic Apparatus and Device Manufacturing M...

THERMAL CONDITIONING SYSTEM FOR THERMAL CONDITIONING A PART OF A LI...

System and Method for Detecting at Least One Contamination Species...

OPTICAL ELEMENT FOR A LITHOGRAPHIC APPARATUS, LITHOGRAPHIC APPARATU...

RADIATION SOURCE, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING M...

PARTICLE CLEANING OF OPTICAL ELEMENTS FOR MICROLITHOGRAPHY

RADIATION SOURCE, LITHOGRAPHIC APPARATUS, AND DEVICE MANUFACTURING...

Lithographic Apparatus and Method of Manufacturing an Electrostatic...

System and Method for Detecting at Least One Contamination Species...

LITHOGRAPHIC APPARATUS AND CONTAMINATION DETECTION METHOD

MULTILAYER MIRROR AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, CLEANING SYSTE...

LITHOGRAPHIC APPARATUS COMPRISING AN INTERNAL SENSOR AND A MINI-REA...

OPTICAL ELEMENT, LITHOGRAPHIC APPARATUS INCLUDING SUCH AN OPTICAL E...

RADIATION SYSTEM AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS COMPRISING A MAGNET, METHOD FOR THE PROTECTI...

LITHOGRAPHIC APPARATUS, A PROJECTION SYSTEM AND A DEVICE MANUFACTUR...

Method for removing a contamination layer from an optical surface a...

System for Contactless Cleaning, Lithographic Apparatus and Device...

APPARATUS AND METHOD FOR MEASURING THE OUTGASSING AND EUV LITHOGRAP...

SOURCE MODULE, RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

RADIATION SOURCE AND LITHOGRAPHIC APPARATUS

METHOD FOR REMOVING CONTAMINATION ON OPTICAL SURFACES AND OPTICAL A...

OPTICAL ARRANGEMENT, IN PARTICULAR PROJECTION EXPOSURE APPARATUS FO...

Lithographic Apparatus, and Device Manufacturing Method

Illumination system and filter system

MODULE AND METHOD FOR PRODUCING EXTREME ULTRAVIOLET RADIATION

Radical cleaning arrangement for a lithographic apparatus

OPTICAL SYSTEM FOR RADIATION IN THE EUV-WAVELENGTH RANGE AND METHOD...

Lithographic apparatus and device manufacturing method