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Johannes Keppler
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Palo Alto, CA, US
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last 30 patents
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Patent Grant
Support plate for localized heating in thermal processing systems
Patent number
12,080,568
Issue date
Sep 3, 2024
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Support plate for localized heating in thermal processing systems
Patent number
11,521,868
Issue date
Dec 6, 2022
BEIJING E-TOWN SEMICONDUCTOR TECHNOLOGY, CO., LTD
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
Publication number
20240387205
Publication date
Nov 21, 2024
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
Publication number
20230098442
Publication date
Mar 30, 2023
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Support Plate for Localized Heating in Thermal Processing Systems
Publication number
20190295869
Publication date
Sep 26, 2019
Mattson Technology, Inc.
Rolf Bremensdorfer
H01 - BASIC ELECTRIC ELEMENTS