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Johannes Martinus Andreas Hazenberg
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Veldhoven, NL
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last 30 patents
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Patent Application
Lithographic apparatus, device manufacturing method and exchangeabl...
Publication number
20070177122
Publication date
Aug 2, 2007
ASML NETHERLANDS B.V.
Erik Roelof Loopstra
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
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Patent Application
Substrate handler, lithographic apparatus and device manufacturing...
Publication number
20070008512
Publication date
Jan 11, 2007
ASML NETHERLANDS B.V.
Harmen Klaas Van Der Schoot
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY