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Johannes Mathias Theodorus Antonius Adriaens
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Eindhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
8,330,941
Issue date
Dec 11, 2012
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Calibration method for a lithographic apparatus
Patent number
7,684,011
Issue date
Mar 23, 2010
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
7,557,903
Issue date
Jul 7, 2009
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and computer p...
Patent number
7,352,473
Issue date
Apr 1, 2008
ASML Netherlands B.V.
Johannes Mathias Theodorus Antonius Adriaens
G01 - MEASURING TESTING
Information
Patent Grant
Lithographic apparatus and a method of calibrating such an apparatus
Patent number
7,283,249
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Emiel Jozef Melanie Eussen
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of calibration, calibration substrate, and method of device...
Patent number
7,102,736
Issue date
Sep 5, 2006
ASML Netherlands B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
Calibration method for a lithographic apparatus
Publication number
20080212055
Publication date
Sep 4, 2008
ASML NETHERLANDS B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method of calibration, calibration substrate, and method of device...
Publication number
20050286042
Publication date
Dec 29, 2005
ASML NETHERLANDS B.V.
Carolus Johannes Catharina Schoormans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY