Johannes Paulus Adrianus Maria Van Den Heuvel

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Heeze, NL

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Patents Grantslast 30 patents

Information Patent Grant
Lithographic apparatus and method
- Patent number 7,626,681
- Issue date Dec 1, 2009
- ASML Netherlands B.V.
- Budiman Sutedja
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY