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Johannes Persch
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Etgert, DE
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last 30 patents
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Patent Application
COMPUTER IMPLEMENTED METHOD FOR DEFECT DETECTION IN AN IMAGING DATA...
Publication number
20250216842
Publication date
Jul 3, 2025
Carl Zeiss SMT GMBH
Abhilash SRIKANTHA
G05 - CONTROLLING REGULATING
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Patent Application
3D VOLUME INSPECTION OF SEMICONDUCTOR WAFERS WITH INCREASED THROUGH...
Publication number
20250022680
Publication date
Jan 16, 2025
Carl Zeiss SMT GMBH
Dmitry Klochkov
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
Publication number
20240311698
Publication date
Sep 19, 2024
Carl Zeiss SMT GMBH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING
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Patent Application
SEGMENTATION OR CROSS SECTIONS OF HIGH ASPECT RATIO STRUCTURES
Publication number
20240087134
Publication date
Mar 14, 2024
Carl Zeiss SMT GMBH
Dmitry Klochkov
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Application
MEASUREMENT METHOD AND APPARATUS FOR SEMICONDUCTOR FEATURES WITH IN...
Publication number
20230196189
Publication date
Jun 22, 2023
Carl Zeiss SMT GMBH
Alexander Freytag
G06 - COMPUTING CALCULATING COUNTING