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Johannes Wilhelmus Maria Krikhaar
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Veldhoven, NL
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Patents Grants
last 30 patents
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Patent Grant
Substrate holder and device manufacturing method
Patent number
7,494,828
Issue date
Feb 24, 2009
ASML Netherlands B.V.
Keith Frank Best
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Device, lithographic apparatus and device manufacturing method
Publication number
20070238261
Publication date
Oct 11, 2007
ASML NETHERLANDS B.V.
Johannes Wilhelmus Maria Krikhaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Substrate holder and device manufacturing method
Publication number
20040052031
Publication date
Mar 18, 2004
ASML NETHERLANDS B.V.
Johannes Wilhelmus Maria Krikhaar
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY