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John (Bon-Woong) Koo
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Andover, MA, US
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last 30 patents
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Patent Grant
Particle beam assisted modification of thin film materials
Patent number
8,003,498
Issue date
Aug 23, 2011
Varian Semiconductor Equipment Associates, Inc.
Jonathan G. England
Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information
Patent Grant
Method and apparatus for controlling beam current uniformity in an...
Patent number
8,003,956
Issue date
Aug 23, 2011
Varian Semiconductor Equipment Associates, Inc.
D. Jeffrey Lischer
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
METHOD AND APPARATUS FOR CONTROLLING BEAM CURRENT UNIFORMITY IN AN...
Publication number
20100084582
Publication date
Apr 8, 2010
Varian Semiconductor Equipment Associates, Inc.
D. Jeffrey LISCHER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS
Publication number
20090124066
Publication date
May 14, 2009
Varian Semiconductor Equipment Associates, Inc.
Jonathan G. ENGLAND
C30 - CRYSTAL GROWTH
Information
Patent Application
PARTICLE BEAM ASSISTED MODIFICATION OF THIN FILM MATERIALS
Publication number
20090124065
Publication date
May 14, 2009
Varian Semiconductor Equipment Associates, Inc.
Jonathan G. ENGLAND
C30 - CRYSTAL GROWTH