John Breuer

Person

Munchen, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Primary charged particle beam current measurement
- Patent number 11,817,292
- Issue date Nov 14, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of determining aberrations of a charged particle beam, and...
- Patent number 11,810,753
- Issue date Nov 7, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dominik Ehberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of determining the beam convergence of a focused charged par...
- Patent number 11,791,128
- Issue date Oct 17, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Dominik Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam apparatus and method of controlling sample ch...
- Patent number 11,545,338
- Issue date Jan 3, 2023
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterriftechnik mbH
- Dominik Patrick Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration corrector and method of aligning aberration corrector
- Patent number 11,501,947
- Issue date Nov 15, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device with interferometer for height measure...
- Patent number 11,257,657
- Issue date Feb 22, 2022
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- G01 - MEASURING TESTING
Information Patent Grant
Charged particle beam device, objective lens module, electrode devi...
- Patent number 10,991,544
- Issue date Apr 27, 2021
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration-corrected multibeam source, charged particle beam device...
- Patent number 10,784,072
- Issue date Sep 22, 2020
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Aberration-corrected multibeam source, charged particle beam device...
- Patent number 10,176,965
- Issue date Jan 8, 2019
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal field emitter tip, electron beam device including a thermal...
- Patent number 9,697,983
- Issue date Jul 4, 2017
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Beam separator device, charged particle beam device and methods of...
- Patent number 9,472,373
- Issue date Oct 18, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- Stefan Lanio
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Charged particle beam device, beam deflector device and methods of...
- Patent number 9,349,566
- Issue date May 24, 2016
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF DETERMINING A BEAM CONVERGENCE OF A CHARGED PARTICLE BEAM...
- Publication number 20250037965
- Publication date Jan 30, 2025
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Ehberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...
- Publication number 20240371600
- Publication date Nov 7, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD O...
- Publication number 20240355576
- Publication date Oct 24, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Florian Lampersberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELEC...
- Publication number 20240274396
- Publication date Aug 15, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERR...
- Publication number 20240222063
- Publication date Jul 4, 2024
- ICT Integrated Circuit Testing Gesellschaft für Halbleiterpüftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM SYSTEM, CORRECTOR FOR ABERRATION CORRECTION O...
- Publication number 20240170249
- Publication date May 23, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Pieter Kruit
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF DETERMINING A BRIGHTNESS OF A CHARGED PARTICLE BEAM, METH...
- Publication number 20240126057
- Publication date Apr 18, 2024
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- G01 - MEASURING TESTING
Information Patent Application
METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...
- Publication number 20230352268
- Publication date Nov 2, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...
- Publication number 20230113857
- Publication date Apr 13, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Ehberger
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF DETERMINING THE BEAM CONVERGENCE OF A FOCUSED CHARGED PAR...
- Publication number 20230116466
- Publication date Apr 13, 2023
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR
- Publication number 20220375713
- Publication date Nov 24, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CONTROLLING SAMPLE CH...
- Publication number 20220359152
- Publication date Nov 10, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Dominik Patrick Ehberger
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PRIMARY CHARGED PARTICLE BEAM CURRENT MEASUREMENT
- Publication number 20220208509
- Publication date Jun 30, 2022
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHARGED PARTICLE BEAM DEVICE WITH INTERFEROMETER FOR HEIGHT MEASURE...
- Publication number 20210257182
- Publication date Aug 19, 2021
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- G01 - MEASURING TESTING
Information Patent Application
CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...
- Publication number 20200381208
- Publication date Dec 3, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- Matthias Firnkes
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION-CORRECTED MULTIBEAM SOURCE, CHARGED PARTICLE BEAM DEVICE...
- Publication number 20200027689
- Publication date Jan 23, 2020
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ABERRATION-CORRECTED MULTIBEAM SOURCE, CHARGED PARTICLE BEAM DEVICE...
- Publication number 20190013176
- Publication date Jan 10, 2019
- ICT Integrated Circuit Testing Gesellschaft fur Halbleiterpruftechnik mbH
- John Breuer
- H01 - BASIC ELECTRIC ELEMENTS

John Breuer

Person

Patents Grantslast 30 patents

Primary charged particle beam current measurement

Methods of determining aberrations of a charged particle beam, and...

Method of determining the beam convergence of a focused charged par...

Charged particle beam apparatus and method of controlling sample ch...

Aberration corrector and method of aligning aberration corrector

Charged particle beam device with interferometer for height measure...

Charged particle beam device, objective lens module, electrode devi...

Aberration-corrected multibeam source, charged particle beam device...

Aberration-corrected multibeam source, charged particle beam device...

Thermal field emitter tip, electron beam device including a thermal...

Beam separator device, charged particle beam device and methods of...

Charged particle beam device, beam deflector device and methods of...

Patents Applicationslast 30 patents

METHOD OF DETERMINING A BEAM CONVERGENCE OF A CHARGED PARTICLE BEAM...

METHOD OF DETERMINING AN ENERGY SPECTRUM OR ENERGY WIDTH OF A CHARG...

ABERRATION CORRECTOR, A CHARGED PARTICLE BEAM APPARATUS, A METHOD O...

METHOD OF FORMING A MULTIPOLE DEVICE, METHOD OF INFLUENCING AN ELEC...

CHARGED PARTICLE BEAM COLUMN, CHARGED PARTICLE BEAM CHROMATIC ABERR...

CHARGED PARTICLE BEAM SYSTEM, CORRECTOR FOR ABERRATION CORRECTION O...

METHOD OF DETERMINING A BRIGHTNESS OF A CHARGED PARTICLE BEAM, METH...

METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...

METHODS OF DETERMINING ABERRATIONS OF A CHARGED PARTICLE BEAM, AND...

METHOD OF DETERMINING THE BEAM CONVERGENCE OF A FOCUSED CHARGED PAR...

ABERRATION CORRECTOR AND METHOD OF ALIGNING ABERRATION CORRECTOR

CHARGED PARTICLE BEAM APPARATUS AND METHOD OF CONTROLLING SAMPLE CH...

PRIMARY CHARGED PARTICLE BEAM CURRENT MEASUREMENT

CHARGED PARTICLE BEAM DEVICE WITH INTERFEROMETER FOR HEIGHT MEASURE...

CHARGED PARTICLE BEAM DEVICE, OBJECTIVE LENS MODULE, ELECTRODE DEVI...

ABERRATION-CORRECTED MULTIBEAM SOURCE, CHARGED PARTICLE BEAM DEVICE...

ABERRATION-CORRECTED MULTIBEAM SOURCE, CHARGED PARTICLE BEAM DEVICE...