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John C. Freeman
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Boise, ID, US
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last 30 patents
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Patent Grant
Temperature controlled anode for plasma dry etchers for etching sem...
Patent number
4,859,304
Issue date
Aug 22, 1989
Micron Technology, Inc.
David A. Cathey
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...