John C. Helmer

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Sputtering apparatus with a rotating magnet array having a geometry...
- Patent number 6,024,843
- Issue date Feb 15, 2000
- Novellus Systems, Inc.
- Robert L. Anderson
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Collimated deposition apparatus and method
- Patent number 5,635,036
- Issue date Jun 3, 1997
- Varian Associates, Inc.
- R. Ernest Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Physical vapor deposition employing ion extraction from a plasma
- Patent number 5,482,611
- Issue date Jan 9, 1996
- John C. Helmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Collimated deposition apparatus and method
- Patent number 5,330,628
- Issue date Jul 19, 1994
- Varian Associates, Inc.
- R. Ernest Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Rotating sputtering apparatus for selected erosion
- Patent number 5,252,194
- Issue date Oct 12, 1993
- Varian Associates, Inc.
- Richard E. Demaray
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Sputtering apparatus with a rotating magnet array having a geometry...
- Patent number 4,995,958
- Issue date Feb 26, 1991
- Varian Associates, Inc.
- Robert L. Anderson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Inverted re-entrant magnetron ion source
- Patent number 4,774,437
- Issue date Sep 27, 1988
- Varian Associates, Inc.
- John C. Helmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Planar penning magnetron sputtering device
- Patent number 4,629,548
- Issue date Dec 16, 1986
- Varian Associates, Inc.
- John C. Helmer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Magnetron sputter device having planar and curved targets
- Patent number 4,606,806
- Issue date Aug 19, 1986
- Varian Associates, Inc.
- John C. Helmer
- H01 - BASIC ELECTRIC ELEMENTS

John C. Helmer

Person

Patents Grantslast 30 patents

Sputtering apparatus with a rotating magnet array having a geometry...

Collimated deposition apparatus and method

Physical vapor deposition employing ion extraction from a plasma

Collimated deposition apparatus and method

Rotating sputtering apparatus for selected erosion

Sputtering apparatus with a rotating magnet array having a geometry...

Inverted re-entrant magnetron ion source

Planar penning magnetron sputtering device

Magnetron sputter device having planar and curved targets