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John D. Boniface
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Santa Clara, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Ultra-high vacuum transport and storage
Patent number
10,153,282
Issue date
Dec 11, 2018
Lam Research Corporation
Theodoros Panagopoulos
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of orienting an upper electrode relative to a lower electrod...
Patent number
8,398,875
Issue date
Mar 19, 2013
Lam Research Corporation
Gregory S. Sexton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus for aligning electrodes in a process chamber to protect a...
Patent number
7,922,866
Issue date
Apr 12, 2011
Lam Research Corporation
Gregory S. Sexton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Methods of and apparatus for aligning electrodes in a process chamb...
Patent number
7,662,254
Issue date
Feb 16, 2010
Lam Research Corporation
Gregory S. Sexton
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
ATOMIC LAYER ETCHING OF AL203 USING A COMBINATION OF PLASMA AND VAP...
Publication number
20170256416
Publication date
Sep 7, 2017
LAM RESEARCH CORPORATION
Andreas Fischer
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD OF ORIENTING AN UPPER ELECTRODE RELATIVE TO A LOWER ELECTROD...
Publication number
20110165779
Publication date
Jul 7, 2011
Gregory S. Sexton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Apparatus For Aligning Electrodes In A Process Chamber to Protect A...
Publication number
20100096087
Publication date
Apr 22, 2010
Gregory S. Sexton
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Methods of and apparatus for aligning electrodes in a process chamb...
Publication number
20080190556
Publication date
Aug 14, 2008
LAM RESEARCH CORPORATION
Gregory S. Sexton
H01 - BASIC ELECTRIC ELEMENTS