John D. Heaton

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Metrology/inspection positioning system
- Patent number 7,295,314
- Issue date Nov 13, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G01 - MEASURING TESTING
Information Patent Grant
Image control in a metrology/inspection positioning system
- Patent number 7,289,215
- Issue date Oct 30, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G02 - OPTICS
Information Patent Grant
Alignment target with designed in offset
- Patent number 7,230,705
- Issue date Jun 12, 2007
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Positioning two elements using an alignment target with a designed...
- Patent number 7,046,361
- Issue date May 16, 2006
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Measuring an alignment target with a single polarization state
- Patent number 6,992,764
- Issue date Jan 31, 2006
- Nanometrics Incorporated
- Weidong Yang
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Method and apparatus for using an alignment target with designed in...
- Patent number 6,982,793
- Issue date Jan 3, 2006
- Nanometrics Incorporated
- Weidong Yang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Encoder measurement based on layer thickness
- Patent number 6,970,255
- Issue date Nov 29, 2005
- Nanometrics Incorporated
- Blaine R. Spady
- G01 - MEASURING TESTING
Information Patent Grant
Encoder with an alignment target
- Patent number 6,958,819
- Issue date Oct 25, 2005
- Nanometrics Incorporated
- John D. Heaton
- G01 - MEASURING TESTING
Information Patent Grant
Precision polar coordinate stage
- Patent number 6,910,847
- Issue date Jun 28, 2005
- Nanometrics Incorporated
- Christopher W. Blaufus
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Combination of normal and oblique incidence polarimetry for the cha...
- Patent number 6,713,753
- Issue date Mar 30, 2004
- Nanometrics Incorporated
- Pablo I. Rovira
- G01 - MEASURING TESTING
Information Patent Grant
Sample support with a non-reflecting sample supporting surface
- Patent number 6,108,077
- Issue date Aug 22, 2000
- Nanometrics Incorporated
- John D. Heaton
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
IMAGE CONTROL IN A METROLOGY/INSPECTION POSITIONING SYSTEM
- Publication number 20070222991
- Publication date Sep 27, 2007
- Nanometrics Incorporated
- Blaine R. Spady
- G02 - OPTICS

John D. Heaton

Person

Patents Grantslast 30 patents

Metrology/inspection positioning system

Image control in a metrology/inspection positioning system

Alignment target with designed in offset

Positioning two elements using an alignment target with a designed...

Measuring an alignment target with a single polarization state

Method and apparatus for using an alignment target with designed in...

Encoder measurement based on layer thickness

Encoder with an alignment target

Precision polar coordinate stage

Combination of normal and oblique incidence polarimetry for the cha...

Sample support with a non-reflecting sample supporting surface

Patents Applicationslast 30 patents

IMAGE CONTROL IN A METROLOGY/INSPECTION POSITIONING SYSTEM