Membership
Tour
Register
Log in
John D. Herb
Follow
Person
Phoenix, AZ, US
People
Overview
Industries
Organizations
People
Information
Impact
Patents Grants
last 30 patents
Information
Patent Grant
CMP apparatus and method
Patent number
7,229,339
Issue date
Jun 12, 2007
Novellus Systems, Inc.
John F. Stumpf
B24 - GRINDING POLISHING
Information
Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
Patent number
7,140,956
Issue date
Nov 28, 2006
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Grant
Platen and manifold for polishing workpieces
Patent number
7,040,957
Issue date
May 9, 2006
Novellus Systems Inc.
Stephen C. Schultz
B24 - GRINDING POLISHING
Information
Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
Patent number
7,025,664
Issue date
Apr 11, 2006
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
Patent number
7,014,541
Issue date
Mar 21, 2006
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Grant
Low amplitude, high speed polisher and method
Patent number
6,913,528
Issue date
Jul 5, 2005
SpeedFam-IPEC Corporation
Stephen C. Schulz
B24 - GRINDING POLISHING
Information
Patent Grant
Polishing pad window for a chemical-mechanical polishing tool
Patent number
6,878,039
Issue date
Apr 12, 2005
SpeedFam-IPEC Corporation
Charles Chiun-Chieh Yang
B24 - GRINDING POLISHING
Information
Patent Grant
Work piece carrier with adjustable pressure zones and barriers and...
Patent number
6,659,850
Issue date
Dec 9, 2003
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
Patent number
6,612,903
Issue date
Sep 2, 2003
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Grant
Apparatus for distributing a fluid through a polishing pad
Patent number
6,599,175
Issue date
Jul 29, 2003
Speedfam-IPECA Corporation
John D. Herb
B24 - GRINDING POLISHING
Information
Patent Grant
Method and apparatus for sensing a wafer in a carrier
Patent number
6,568,991
Issue date
May 27, 2003
SpeedFam-IPEC Corporation
John D. Herb
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier head with reduced moment wear ring
Patent number
6,540,592
Issue date
Apr 1, 2003
SpeedFam-IPEC Corporation
Stephen C. Schultz
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier including a multi-volume diaphragm for polishing a semicond...
Patent number
6,447,379
Issue date
Sep 10, 2002
SpeedFam-IPEC Corporation
Robert D. Gromko
B24 - GRINDING POLISHING
Information
Patent Grant
Workpiece carrier with adjustable pressure zones and barriers
Patent number
6,390,905
Issue date
May 21, 2002
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Grant
Carrier having pistons for distributing a pressing force on the bac...
Patent number
6,336,853
Issue date
Jan 8, 2002
SpeedFam-IPEC Corporation
Stephen C. Schultz
B24 - GRINDING POLISHING
Patents Applications
last 30 patents
Information
Patent Application
CMP apparatus and method
Publication number
20060003671
Publication date
Jan 5, 2006
John F. Stumpf
B24 - GRINDING POLISHING
Information
Patent Application
INTEGRATED PRESSURE CONTROL SYSTEM FOR WORKPIECE CARRIER
Publication number
20050070205
Publication date
Mar 31, 2005
SpeedFam-IPEC Corporation
Nikolay Korovin
B24 - GRINDING POLISHING
Information
Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
Publication number
20040259476
Publication date
Dec 23, 2004
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
Publication number
20040067717
Publication date
Apr 8, 2004
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Application
Platen and manifold for polishing workpieces
Publication number
20040033759
Publication date
Feb 19, 2004
Stephen C. Schultz
B24 - GRINDING POLISHING
Information
Patent Application
Polishing pad window for a chemical-mechanical polishing tool
Publication number
20030143925
Publication date
Jul 31, 2003
Charles Chiun-Chieh Yang
B24 - GRINDING POLISHING
Information
Patent Application
Front-reference carrier on orbital solid platen
Publication number
20030077986
Publication date
Apr 24, 2003
SpeedFam-IPEC Corporation
Stephen C. Schultz
B24 - GRINDING POLISHING
Information
Patent Application
Method and apparatus for sensing a wafer in a carrier
Publication number
20030045205
Publication date
Mar 6, 2003
John D. Herb
B24 - GRINDING POLISHING
Information
Patent Application
Apparatus for distributing a fluid through a polishing pad
Publication number
20030027506
Publication date
Feb 6, 2003
John D. Herb
B24 - GRINDING POLISHING
Information
Patent Application
Low amplitude, high speed polisher and method
Publication number
20020132561
Publication date
Sep 19, 2002
SpeedFam-IPEC Corporation
Stephen C. Schulz
B24 - GRINDING POLISHING
Information
Patent Application
Work piece carrier with adjustable pressure zones and barriers and...
Publication number
20020111122
Publication date
Aug 15, 2002
Nikolay N. Korovin
B24 - GRINDING POLISHING
Information
Patent Application
Workpiece carrier with adjustable pressure zones and barriers
Publication number
20020061716
Publication date
May 23, 2002
SpeedFam-IPEC Corporation
Nikolay N. Korovin
B24 - GRINDING POLISHING