John Daugherty

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Laminated aerosol deposition coating for aluminum components for pl...
- Patent number 12,198,902
- Issue date Jan 14, 2025
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for conditioning semiconductor processing chamber components
- Patent number 12,129,569
- Issue date Oct 29, 2024
- Lam Research Corporation
- Lin Xu
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 12,087,561
- Issue date Sep 10, 2024
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Chamber component cleanliness measurement system
- Patent number 12,072,318
- Issue date Aug 27, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Conditioning chamber component
- Patent number 12,064,795
- Issue date Aug 20, 2024
- Lam Research Corporation
- Amir A. Yasseri
- B08 - CLEANING
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,764,086
- Issue date Sep 19, 2023
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,710,623
- Issue date Jul 25, 2023
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
MEMS coriolis gas flow controller
- Patent number 11,662,237
- Issue date May 30, 2023
- Lam Research Corporation
- Iqbal A. Shareef
- G01 - MEASURING TESTING
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 11,393,705
- Issue date Jul 19, 2022
- Lam Research Corporation
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method to selectively pattern a surface for plasma resistant coat a...
- Patent number 11,124,659
- Issue date Sep 21, 2021
- Lam Research Corporation
- Amir A. Yasseri
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Systems for removing and replacing consumable parts from a semicond...
- Patent number 11,112,773
- Issue date Sep 7, 2021
- Lam Research Corporation
- David D. Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Quartz component with protective coating
- Patent number 11,087,961
- Issue date Aug 10, 2021
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Vacuum pump protection against deposition byproduct buildup
- Patent number 11,031,215
- Issue date Jun 8, 2021
- Lam Research Corporation
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Conditioning chamber component
- Patent number 10,967,407
- Issue date Apr 6, 2021
- Lam Research Corporation
- Amir A. Yasseri
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for plasma processing chamber
- Patent number 10,964,514
- Issue date Mar 30, 2021
- Lam Research Corporation
- Evan Edward Patton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,914,003
- Issue date Feb 9, 2021
- Lam Research Corporation
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 10,790,174
- Issue date Sep 29, 2020
- Lam Research Corporation
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System implementing machine learning in complex multivariate wafer...
- Patent number 10,615,009
- Issue date Apr 7, 2020
- Lam Research Corporation
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Monolithic gas distribution manifold and various construction techn...
- Patent number 10,557,197
- Issue date Feb 11, 2020
- Lam Research Corporation
- Andrew C. Lee
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Load lock interface and integrated post-processing module
- Patent number 10,304,707
- Issue date May 28, 2019
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer transport assembly with integrated buffers
- Patent number 10,014,196
- Issue date Jul 3, 2018
- Lam Research Corporation
- John Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and process of implementing machine learning in complex mult...
- Patent number 9,972,478
- Issue date May 15, 2018
- Lam Research Corporation
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for conditioning silicon part
- Patent number 9,947,558
- Issue date Apr 17, 2018
- Lam Research Corporation
- Lin Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Service tunnel for use on capital equipment in semiconductor manufa...
- Patent number 9,929,028
- Issue date Mar 27, 2018
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Coating system and method for coating interior fluid wetted surface...
- Patent number 9,873,940
- Issue date Jan 23, 2018
- Lam Research Corporation
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dielectric window cleaning apparatuses
- Patent number 9,623,449
- Issue date Apr 18, 2017
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Monolithic ceramic component of gas delivery system and method of m...
- Patent number 9,580,360
- Issue date Feb 28, 2017
- Lam Research Corporation
- John Daugherty
- B28 - WORKING CEMENT, CLAY, OR STONE
Information Patent Grant
Dense oxide coated component of a plasma processing chamber and met...
- Patent number 9,546,432
- Issue date Jan 17, 2017
- Lam Research Corporation
- Hong Shih
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Portable sonic particle removal tool with a chemically controlled w...
- Patent number 9,505,036
- Issue date Nov 29, 2016
- Lam Research Corporation
- Armen Avoyan
- B08 - CLEANING
Information Patent Grant
Service tunnel for use on capital equipment in semiconductor manufa...
- Patent number 9,502,275
- Issue date Nov 22, 2016
- Lam Research Corporation
- David Trussell
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20240383017
- Publication date Nov 21, 2024
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20230317437
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING A...
- Publication number 20230215703
- Publication date Jul 6, 2023
- LAM RESEARCH CORPORATION
- Robin KOSHY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS
- Publication number 20230092570
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Lin XU
- C25 - ELECTROLYTIC OR ELECTROPHORETIC PROCESSES APPARATUS THEREFOR
Information Patent Application
YTTRIUM ALUMINUM COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20230088848
- Publication date Mar 23, 2023
- LAM RESEARCH CORPORATION
- Lin XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW TEMPERATURE SINTERED COATINGS FOR PLASMA CHAMBERS
- Publication number 20230020387
- Publication date Jan 19, 2023
- LAM RESEARCH CORPORATION
- David Joseph WETZEL
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT
- Publication number 20220392753
- Publication date Dec 8, 2022
- Lin XU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20220344183
- Publication date Oct 27, 2022
- LAM RESEARCH CORPORATION
- David TRUSSELL
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM
- Publication number 20220252548
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS
- Publication number 20220246404
- Publication date Aug 4, 2022
- LAM RESEARCH CORPORATION
- Benjamin Philip HEINE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SURFACE COATING TREATMENT
- Publication number 20220186354
- Publication date Jun 16, 2022
- LAM RESEARCH CORPORATION
- Ann ERICKSON
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LAMINATED AEROSOL DEPOSITION COATING FOR ALUMINUM COMPONENTS FOR PL...
- Publication number 20220115214
- Publication date Apr 14, 2022
- LAM RESEARCH CORPORATION
- Lin XU
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PIN-LIFTER TEST SUBSTRATE
- Publication number 20220013388
- Publication date Jan 13, 2022
- LAM RESEARCH CORPORATION
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR MEASURING PARTICLES
- Publication number 20210341377
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- G01 - MEASURING TESTING
Information Patent Application
QUARTZ COMPONENT WITH PROTECTIVE COATING
- Publication number 20210343510
- Publication date Nov 4, 2021
- LAM RESEARCH CORPORATION
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20210257195
- Publication date Aug 19, 2021
- LAM RESEARCH CORPORATION
- John Stephen DREWERY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20210205858
- Publication date Jul 8, 2021
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MEMS CORIOLIS GAS FLOW CONTROLLER
- Publication number 20210140807
- Publication date May 13, 2021
- LAM RESEARCH CORPORATION
- Iqbal A. SHAREEF
- G01 - MEASURING TESTING
Information Patent Application
WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS
- Publication number 20210005485
- Publication date Jan 7, 2021
- LAM RESEARCH CORPORATION
- John E. Daugherty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...
- Publication number 20200141002
- Publication date May 7, 2020
- LAM RESEARCH CORPORATION
- Andrew C. Lee
- B24 - GRINDING POLISHING
Information Patent Application
COOLING SYSTEM FOR RF POWER ELECTRONICS
- Publication number 20200111688
- Publication date Apr 9, 2020
- LAM RESEARCH CORPORATION
- Sudhakar Gopalakrishinan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP
- Publication number 20200105509
- Publication date Apr 2, 2020
- LAM RESEARCH CORPORATION
- John Stephen Drewery
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
QUARTZ COMPONENT WITH PROTECTIVE COATING
- Publication number 20190272981
- Publication date Sep 5, 2019
- LAM RESEARCH CORPORATION
- Lin Xu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT A...
- Publication number 20190233658
- Publication date Aug 1, 2019
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
Electrode for Plasma Processing Chamber
- Publication number 20190115189
- Publication date Apr 18, 2019
- LAM RESEARCH CORPORATION
- Evan Edward Patton
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CONDITIONING CHAMBER COMPONENT
- Publication number 20180318890
- Publication date Nov 8, 2018
- LAM RESEARCH CORPORATION
- Amir A. YASSERI
- B08 - CLEANING
Information Patent Application
System Implementing Machine Learning in Complex Multivariate Wafer...
- Publication number 20180247798
- Publication date Aug 30, 2018
- LAM RESEARCH CORPORATION
- Joydeep Guha
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Wafer Transport Assembly With Integrated Buffers
- Publication number 20180233387
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- John DAUGHERTY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLING SYSTEM FOR RF POWER ELECTRONICS
- Publication number 20180235110
- Publication date Aug 16, 2018
- LAM RESEARCH CORPORATION
- Sudhakar GOPALAKRISHNAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING
- Publication number 20180144909
- Publication date May 24, 2018
- LAM RESEARCH CORPORATION
- Lihua Li HUANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

John Daugherty

Person

Patents Grantslast 30 patents

Laminated aerosol deposition coating for aluminum components for pl...

Method for conditioning semiconductor processing chamber components

Vacuum pump protection against deposition byproduct buildup

Chamber component cleanliness measurement system

Conditioning chamber component

Wafer transport assembly with integrated buffers

Vacuum pump protection against deposition byproduct buildup

MEMS coriolis gas flow controller

Wafer transport assembly with integrated buffers

Method to selectively pattern a surface for plasma resistant coat a...

Systems for removing and replacing consumable parts from a semicond...

Quartz component with protective coating

Vacuum pump protection against deposition byproduct buildup

Conditioning chamber component

Electrode for plasma processing chamber

Monolithic gas distribution manifold and various construction techn...

Wafer transport assembly with integrated buffers

System implementing machine learning in complex multivariate wafer...

Monolithic gas distribution manifold and various construction techn...

Load lock interface and integrated post-processing module

Wafer transport assembly with integrated buffers

Method and process of implementing machine learning in complex mult...

Method for conditioning silicon part

Service tunnel for use on capital equipment in semiconductor manufa...

Coating system and method for coating interior fluid wetted surface...

Dielectric window cleaning apparatuses

Monolithic ceramic component of gas delivery system and method of m...

Dense oxide coated component of a plasma processing chamber and met...

Portable sonic particle removal tool with a chemically controlled w...

Service tunnel for use on capital equipment in semiconductor manufa...

Patents Applicationslast 30 patents

CONDITIONING CHAMBER COMPONENT

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

SEALING SURFACES OF COMPONENTS USED IN PLASMA ETCHING TOOLS USING A...

METHOD FOR CONDITIONING SEMICONDUCTOR PROCESSING CHAMBER COMPONENTS

YTTRIUM ALUMINUM COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

LOW TEMPERATURE SINTERED COATINGS FOR PLASMA CHAMBERS

SINGLE CRYSTAL METAL OXIDE PLASMA CHAMBER COMPONENT

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

CHAMBER COMPONENT CLEANLINESS MEASUREMENT SYSTEM

SEALANT COATING FOR PLASMA PROCESSING CHAMBER COMPONENTS

SURFACE COATING TREATMENT

LAMINATED AEROSOL DEPOSITION COATING FOR ALUMINUM COMPONENTS FOR PL...

PIN-LIFTER TEST SUBSTRATE

METHOD AND APPARATUS FOR MEASURING PARTICLES

QUARTZ COMPONENT WITH PROTECTIVE COATING

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

CONDITIONING CHAMBER COMPONENT

MEMS CORIOLIS GAS FLOW CONTROLLER

WAFER TRANSPORT ASSEMBLY WITH INTEGRATED BUFFERS

MONOLITHIC GAS DISTRIBUTION MANIFOLD AND VARIOUS CONSTRUCTION TECHN...

COOLING SYSTEM FOR RF POWER ELECTRONICS

VACUUM PUMP PROTECTION AGAINST DEPOSITION BYPRODUCT BUILDUP

QUARTZ COMPONENT WITH PROTECTIVE COATING

METHOD TO SELECTIVELY PATTERN A SURFACE FOR PLASMA RESISTANT COAT A...

Electrode for Plasma Processing Chamber

CONDITIONING CHAMBER COMPONENT

System Implementing Machine Learning in Complex Multivariate Wafer...

Wafer Transport Assembly With Integrated Buffers

COOLING SYSTEM FOR RF POWER ELECTRONICS

PLASMA ETCHING DEVICE WITH PLASMA ETCH RESISTANT COATING