John E. Hench

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Full beam metrology for x-ray scatterometry systems
- Patent number 12,320,763
- Issue date Jun 3, 2025
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Computationally efficient x-ray based overlay measurement
- Patent number 11,428,650
- Issue date Aug 30, 2022
- KLA Corporation
- John Hench
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Full beam metrology for x-ray scatterometry systems
- Patent number 11,313,816
- Issue date Apr 26, 2022
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Visualization of three-dimensional semiconductor structures
- Patent number 11,099,137
- Issue date Aug 24, 2021
- KLA Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Methods and systems for characterization of an x-ray beam with high...
- Patent number 11,073,487
- Issue date Jul 27, 2021
- KLA-Tencor Corporation
- Alexander Bykanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
On-device metrology using target decomposition
- Patent number 10,983,227
- Issue date Apr 20, 2021
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Grant
Visualization of three-dimensional semiconductor structures
- Patent number 10,794,839
- Issue date Oct 6, 2020
- KLA Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Full beam metrology for X-ray scatterometry systems
- Patent number 10,775,323
- Issue date Sep 15, 2020
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Phase revealing optical and X-ray semiconductor metrology
- Patent number 10,677,586
- Issue date Jun 9, 2020
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Grant
Computationally efficient X-ray based overlay measurement
- Patent number 10,545,104
- Issue date Jan 28, 2020
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Grant
Calibration of a small angle X-ray scatterometry based metrology sy...
- Patent number 10,481,111
- Issue date Nov 19, 2019
- KLA-Tencor Corporation
- John Hench
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Grant
Method of optimizing an optical parametric model for structural ana...
- Patent number 10,325,004
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- Thaddeus G. Dziura
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Measurement system optimization for X-ray based metrology
- Patent number 10,324,050
- Issue date Jun 18, 2019
- KLA-Tencor Corporation
- John J. Hench
- G01 - MEASURING TESTING
Information Patent Grant
Compressive sensing for metrology
- Patent number 10,062,157
- Issue date Aug 28, 2018
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Small-angle scattering X-ray metrology systems and methods
- Patent number 9,846,132
- Issue date Dec 19, 2017
- KLA-Tencor Corporation
- Michael S. Bakeman
- G01 - MEASURING TESTING
Information Patent Grant
Computation efficiency by iterative spatial harmonics order truncation
- Patent number 9,523,800
- Issue date Dec 20, 2016
- KLA-Tencor Corporation
- Andrei Veldman
- G02 - OPTICS
Information Patent Grant
Compressive sensing for metrology
- Patent number 9,518,916
- Issue date Dec 13, 2016
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G01 - MEASURING TESTING
Information Patent Grant
Scatterometry-based imaging and critical dimension metrology
- Patent number 9,494,535
- Issue date Nov 15, 2016
- KLA-Tencor Corporation
- Abdurrahman Sezginer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optimizing an optical parametric model for structural analysis usin...
- Patent number 9,310,296
- Issue date Apr 12, 2016
- KLA-Tencor Corporation
- Thaddeus G. Dziura
- G01 - MEASURING TESTING
Information Patent Grant
Measuring critical dimensions of a semiconductor structure
- Patent number 8,798,966
- Issue date Aug 5, 2014
- KLA-Tencor Corporation
- John Hench
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Model-based metrology using tesselation-based discretization
- Patent number 8,760,649
- Issue date Jun 24, 2014
- KLA-Tencor Corporation
- Andrei Veldman
- G01 - MEASURING TESTING
Information Patent Grant
Method for automated determination of an optimally parameterized sc...
- Patent number 8,666,703
- Issue date Mar 4, 2014
- Tokyo Electron Limited
- Jason Ferns
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Wide process range library for metrology
- Patent number 8,381,140
- Issue date Feb 19, 2013
- Tokyo Electron Limited
- John J. Hench
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Neural network based hermite interpolator for scatterometry paramet...
- Patent number 8,108,328
- Issue date Jan 31, 2012
- Tokyo Electron Limited
- John J. Hench
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Mitigation of interference and crosstalk in communications systems
- Patent number 7,978,591
- Issue date Jul 12, 2011
- Tokyo Electron Limited
- Mark Alan Erickson
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method and apparatus for the prediction and optimization in impaire...
- Patent number 7,864,692
- Issue date Jan 4, 2011
- Tokyo Electron Limited
- John Josef Hench
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Method for optimizing the configuration of a scatterometry measurem...
- Patent number 7,826,072
- Issue date Nov 2, 2010
- KLA-Tencor Technologies Corporation
- Daniel C. Wack
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for providing an analog front end for multiline t...
- Patent number 7,796,544
- Issue date Sep 14, 2010
- Tokyo Electron Limited
- John J. Hench
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Model-based measurement of semiconductor device features with feed...
- Patent number 7,716,003
- Issue date May 11, 2010
- KLA-Tencor Technologies Corporation
- Daniel C. Wack
- G01 - MEASURING TESTING
Information Patent Grant
Method for selecting optical configuration for high-precision scatt...
- Patent number 7,602,509
- Issue date Oct 13, 2009
- KLA-Tencor Corporation
- John J. Hench
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
Forward Library Based Seeding For Efficient X-Ray Scatterometry Mea...
- Publication number 20250085241
- Publication date Mar 13, 2025
- KLA Corporation
- Rebecca Shen
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Measurement Of Semiconductor Structures Wit...
- Publication number 20240353760
- Publication date Oct 24, 2024
- KLA Corporation
- John J. Hench
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Model-less, Scatterometry Based Measurement...
- Publication number 20240085321
- Publication date Mar 14, 2024
- KLA Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For X-Ray Scatterometry Measurements Employing...
- Publication number 20240060914
- Publication date Feb 22, 2024
- KLA Corporation
- Mohsen Mahvash
- G01 - MEASURING TESTING
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20220268714
- Publication date Aug 25, 2022
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Methods And Systems For Accurate Measurement Of Deep Structures Hav...
- Publication number 20220252395
- Publication date Aug 11, 2022
- KLA Corporation
- John J. Hench
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Visualization of Three-Dimensional Semiconductor Structures
- Publication number 20200393386
- Publication date Dec 17, 2020
- KLA Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20200300790
- Publication date Sep 24, 2020
- KLA Corporation
- Antonio Arion Gellineau
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Visualization of Three-Dimensional Semiconductor Structures
- Publication number 20200271595
- Publication date Aug 27, 2020
- KLA-Tencor Corporation
- Aaron J. Rosenberg
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Computationally Efficient X-ray Based Overlay Measurement
- Publication number 20200116655
- Publication date Apr 16, 2020
- KLA Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Phase Revealing Optical and X-Ray Semiconductor Metrology
- Publication number 20200080836
- Publication date Mar 12, 2020
- KLA-Tencor Corporation
- John Hench
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR FAST AUTOMATIC DETE...
- Publication number 20200025554
- Publication date Jan 23, 2020
- KLA-Tencor Corporation
- Antonio A. Gellineau
- G01 - MEASURING TESTING
Information Patent Application
On-Device Metrology Using Target Decomposition
- Publication number 20190049602
- Publication date Feb 14, 2019
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Methods And Systems For Characterization Of An X-Ray Beam With High...
- Publication number 20180328868
- Publication date Nov 15, 2018
- KLA-Tencor Corporation
- Alexander Bykanov
- G01 - MEASURING TESTING
Information Patent Application
Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...
- Publication number 20180113084
- Publication date Apr 26, 2018
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Full Beam Metrology For X-Ray Scatterometry Systems
- Publication number 20180106735
- Publication date Apr 19, 2018
- KLA-Tencor Corporation
- Antonio Arion Gellineau
- G01 - MEASURING TESTING
Information Patent Application
COMPRESSIVE SENSING FOR METROLOGY
- Publication number 20170076440
- Publication date Mar 16, 2017
- KLA-Tencor Corporation
- Stilian Ivanov Pandev
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Computationally Efficient X-ray Based Overlay Measurement
- Publication number 20160320319
- Publication date Nov 3, 2016
- KLA-Tencor Corporation
- John Hench
- G01 - MEASURING TESTING
Information Patent Application
Measurement System Optimization For X-Ray Based Metrology
- Publication number 20160202193
- Publication date Jul 14, 2016
- KLA-Tencor Corporation
- John J. Hench
- G01 - MEASURING TESTING
Information Patent Application
Scatterometry-Based Imaging and Critical Dimension Metrology
- Publication number 20150300965
- Publication date Oct 22, 2015
- KLA-Tencor Corporation
- Abdurrahman Sezginer
- G01 - MEASURING TESTING
Information Patent Application
SMALL-ANGLE SCATTERING X-RAY METROLOGY SYSTEMS AND METHODS
- Publication number 20150110249
- Publication date Apr 23, 2015
- KLA-Tencor Corporation
- Michael S. Bakeman
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANA...
- Publication number 20120323356
- Publication date Dec 20, 2012
- Thaddeus G. Dziura
- G01 - MEASURING TESTING
Information Patent Application
WIDE PROCESS RANGE LIBRARY FOR METROLOGY
- Publication number 20120210289
- Publication date Aug 16, 2012
- John J. Hench
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD FOR AUTOMATED DETERMINATION OF AN OPTIMALLY PARAMETERIZED SC...
- Publication number 20120022836
- Publication date Jan 26, 2012
- TOKYO ELECTRON LIMITED
- Jason Ferns
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
COMPUTATION EFFICIENCY BY ITERATIVE SPATIAL HARMONICS ORDER TRUNCATION
- Publication number 20110288822
- Publication date Nov 24, 2011
- Andrei Veldman
- G02 - OPTICS
Information Patent Application
NEURAL NETWORK BASED HERMITE INTERPOLATOR FOR SCATTEROMETRY PARAMET...
- Publication number 20100017351
- Publication date Jan 21, 2010
- John J. Hench
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
Mitigation of Interference and Crosstalk in Communications Systems
- Publication number 20080239937
- Publication date Oct 2, 2008
- TOKYO ELECTRON LIMITED
- Mark Alan Erickson
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Method and system for providing an analog fron end for multiline tr...
- Publication number 20060023645
- Publication date Feb 2, 2006
- John J. Hench
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
Mixed-mode (current-voltage) audio amplifier
- Publication number 20050134374
- Publication date Jun 23, 2005
- John J. Hench
- H03 - BASIC ELECTRONIC CIRCUITRY

John E. Hench

Person

Patents Grantslast 30 patents

Full beam metrology for x-ray scatterometry systems

Computationally efficient x-ray based overlay measurement

Full beam metrology for x-ray scatterometry systems

Visualization of three-dimensional semiconductor structures

Methods and systems for characterization of an x-ray beam with high...

On-device metrology using target decomposition

Visualization of three-dimensional semiconductor structures

Full beam metrology for X-ray scatterometry systems

Phase revealing optical and X-ray semiconductor metrology

Computationally efficient X-ray based overlay measurement

Calibration of a small angle X-ray scatterometry based metrology sy...

Method of optimizing an optical parametric model for structural ana...

Measurement system optimization for X-ray based metrology

Compressive sensing for metrology

Small-angle scattering X-ray metrology systems and methods

Computation efficiency by iterative spatial harmonics order truncation

Compressive sensing for metrology

Scatterometry-based imaging and critical dimension metrology

Optimizing an optical parametric model for structural analysis usin...

Measuring critical dimensions of a semiconductor structure

Model-based metrology using tesselation-based discretization

Method for automated determination of an optimally parameterized sc...

Wide process range library for metrology

Neural network based hermite interpolator for scatterometry paramet...

Mitigation of interference and crosstalk in communications systems

Method and apparatus for the prediction and optimization in impaire...

Method for optimizing the configuration of a scatterometry measurem...

Method and system for providing an analog front end for multiline t...

Model-based measurement of semiconductor device features with feed...

Method for selecting optical configuration for high-precision scatt...

Patents Applicationslast 30 patents

Forward Library Based Seeding For Efficient X-Ray Scatterometry Mea...

Methods And Systems For Measurement Of Semiconductor Structures Wit...

Methods And Systems For Model-less, Scatterometry Based Measurement...

Methods And Systems For X-Ray Scatterometry Measurements Employing...

Full Beam Metrology For X-Ray Scatterometry Systems

Methods And Systems For Accurate Measurement Of Deep Structures Hav...

Visualization of Three-Dimensional Semiconductor Structures

Full Beam Metrology For X-Ray Scatterometry Systems

Visualization of Three-Dimensional Semiconductor Structures

Computationally Efficient X-ray Based Overlay Measurement

Phase Revealing Optical and X-Ray Semiconductor Metrology

SYSTEM, METHOD AND COMPUTER PROGRAM PRODUCT FOR FAST AUTOMATIC DETE...

On-Device Metrology Using Target Decomposition

Methods And Systems For Characterization Of An X-Ray Beam With High...

Calibration Of A Small Angle X-Ray Scatterometry Based Metrology Sy...

Full Beam Metrology For X-Ray Scatterometry Systems

COMPRESSIVE SENSING FOR METROLOGY

Computationally Efficient X-ray Based Overlay Measurement

Measurement System Optimization For X-Ray Based Metrology

Scatterometry-Based Imaging and Critical Dimension Metrology

SMALL-ANGLE SCATTERING X-RAY METROLOGY SYSTEMS AND METHODS

METHOD OF OPTIMIZING AN OPTICAL PARAMETRIC MODEL FOR STRUCTURAL ANA...

WIDE PROCESS RANGE LIBRARY FOR METROLOGY

METHOD FOR AUTOMATED DETERMINATION OF AN OPTIMALLY PARAMETERIZED SC...

COMPUTATION EFFICIENCY BY ITERATIVE SPATIAL HARMONICS ORDER TRUNCATION

NEURAL NETWORK BASED HERMITE INTERPOLATOR FOR SCATTEROMETRY PARAMET...

Mitigation of Interference and Crosstalk in Communications Systems

Method and system for providing an analog fron end for multiline tr...

Mixed-mode (current-voltage) audio amplifier