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John Entralgo
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Austin, TX, US
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last 30 patents
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Patent Grant
Multi-cell resonator microwave surface-wave plasma apparatus
Patent number
10,424,462
Issue date
Sep 24, 2019
Tokyo Electron Limited
Merritt Funk
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
MULTI-CELL RESONATOR MICROWAVE SURFACE-WAVE PLASMA APPARATUS
Publication number
20150126046
Publication date
May 7, 2015
TOKYO ELECTRON LIMITED
Merritt Funk
H01 - BASIC ELECTRIC ELEMENTS