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John Ernst Bjorkholm
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Pleasanton, CA, US
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last 30 patents
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Patent Grant
Method for modifying a chip layout to minimize within-die CD variat...
Patent number
6,898,781
Issue date
May 24, 2005
Intel Corporation
Vivek K. Singh
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Compensation of flare-induced CD changes EUVL
Patent number
6,815,129
Issue date
Nov 9, 2004
EUV LLC
John E. Bjorkholm
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method for modifying a chip layout to minimize within-die CD variat...
Patent number
6,625,802
Issue date
Sep 23, 2003
Intel Corporation
Vivek K. Singh
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
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Patent Application
Method for modifying a chip layout to minimize within-die CD variat...
Publication number
20040025140
Publication date
Feb 5, 2004
Vivek K. Singh
B82 - NANO-TECHNOLOGY
Information
Patent Application
Method for modifying a chip layout to minimize within-die CD variat...
Publication number
20030149956
Publication date
Aug 7, 2003
Vivek K. Singh
B82 - NANO-TECHNOLOGY