John F. Baggett

Person

Amesbury, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Toxic outgas control post process
- Patent number 11,901,198
- Issue date Feb 13, 2024
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for decreasing cool down time with heated system for semicon...
- Patent number 11,728,187
- Issue date Aug 15, 2023
- Axcelis Technologies, Inc.
- John Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Substrate support having customizable and replaceable features for...
- Patent number 11,114,330
- Issue date Sep 7, 2021
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wafer soak temperature readback and control via thermocouple embedd...
- Patent number 11,011,397
- Issue date May 18, 2021
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
In-situ wafer temperature measurement and control
- Patent number 10,903,097
- Issue date Jan 26, 2021
- Axcelis Technologies, Inc.
- John F. Baggett
- G01 - MEASURING TESTING
Information Patent Grant
Radiant heating presoak
- Patent number 10,861,731
- Issue date Dec 8, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Shallow angle, multi-wavelength, multi-receiver, adjustable sensiti...
- Patent number 10,794,694
- Issue date Oct 6, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reduction of condensed gases on chamber walls via heated chamber ho...
- Patent number 10,714,317
- Issue date Jul 14, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low conductance self-shielding insulator for ion implantation systems
- Patent number 10,679,818
- Issue date Jun 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Outgassing impact on process chamber reduction via chamber pump and...
- Patent number 10,227,693
- Issue date Mar 12, 2019
- Axcelis Technologies, Inc.
- John F. Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Wafer temperature control with consideration to beam power input
- Patent number 10,128,084
- Issue date Nov 13, 2018
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Low conductance self-shielding insulator for ion implantation systems
- Patent number 10,074,508
- Issue date Sep 11, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated emissivity sensor alignment characterization
- Patent number 10,041,789
- Issue date Aug 7, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cam actuated filament clamp
- Patent number 9,502,207
- Issue date Nov 22, 2016
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM
- Publication number 20210366746
- Publication date Nov 25, 2021
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TOXIC OUTGAS CONTROL POST PROCESS
- Publication number 20210013061
- Publication date Jan 14, 2021
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA HEATED CHAMBER HO...
- Publication number 20200219705
- Publication date Jul 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA PURGE GAS DILUTIO...
- Publication number 20200216951
- Publication date Jul 9, 2020
- Axcelis Technologies, Inc.
- John F. Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WAFER SOAK TEMPERATURE READBACK AND CONTROL VIA THERMOCOUPLE EMBEDD...
- Publication number 20200203199
- Publication date Jun 25, 2020
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DECREASING COOL DOWN TIME WITH HEATED SYSTEM FOR SEMICON...
- Publication number 20200203196
- Publication date Jun 25, 2020
- Axcelis Technologies, Inc.
- John Baggett
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SUBSTRATE SUPPORT HAVING CUSTOMIZABLE AND REPLACEABLE FEATURES FOR...
- Publication number 20200066570
- Publication date Feb 27, 2020
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL
- Publication number 20190304820
- Publication date Oct 3, 2019
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHALLOW ANGLE, MULTI-WAVELENGTH, MULTI-RECEIVER, ADJUSTABLE SENSITI...
- Publication number 20190120617
- Publication date Apr 25, 2019
- Axcelis Technologies, Inc.
- John F. Baggett
- G01 - MEASURING TESTING
Information Patent Application
LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20180350553
- Publication date Dec 6, 2018
- Axcells Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RADIANT HEATING PRESOAK
- Publication number 20180204755
- Publication date Jul 19, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM
- Publication number 20180197761
- Publication date Jul 12, 2018
- Axcelis Technologies, Inc.
- Joseph Ferrara
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS
- Publication number 20180138006
- Publication date May 17, 2018
- Axcelis Technologies, Inc.
- John Baggett
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED EMISSIVITY SENSOR ALIGNMENT CHARACTERIZATION
- Publication number 20180094921
- Publication date Apr 5, 2018
- Axcelis Technologies, Inc.
- John F. Baggett
- G01 - MEASURING TESTING

John F. Baggett

Person

Patents Grantslast 30 patents

Toxic outgas control post process

Method for decreasing cool down time with heated system for semicon...

Substrate support having customizable and replaceable features for...

Wafer soak temperature readback and control via thermocouple embedd...

In-situ wafer temperature measurement and control

Radiant heating presoak

Shallow angle, multi-wavelength, multi-receiver, adjustable sensiti...

Reduction of condensed gases on chamber walls via heated chamber ho...

Low conductance self-shielding insulator for ion implantation systems

Outgassing impact on process chamber reduction via chamber pump and...

Wafer temperature control with consideration to beam power input

Low conductance self-shielding insulator for ion implantation systems

Integrated emissivity sensor alignment characterization

Cam actuated filament clamp

Patents Applicationslast 30 patents

ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM

TOXIC OUTGAS CONTROL POST PROCESS

REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA HEATED CHAMBER HO...

REDUCTION OF CONDENSED GASES ON CHAMBER WALLS VIA PURGE GAS DILUTIO...

WAFER SOAK TEMPERATURE READBACK AND CONTROL VIA THERMOCOUPLE EMBEDD...

METHOD FOR DECREASING COOL DOWN TIME WITH HEATED SYSTEM FOR SEMICON...

SUBSTRATE SUPPORT HAVING CUSTOMIZABLE AND REPLACEABLE FEATURES FOR...

IN-SITU WAFER TEMPERATURE MEASUREMENT AND CONTROL

SHALLOW ANGLE, MULTI-WAVELENGTH, MULTI-RECEIVER, ADJUSTABLE SENSITI...

LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS

RADIANT HEATING PRESOAK

ACTIVE WORKPIECE HEATING OR COOLING FOR AN ION IMPLANTATION SYSTEM

LOW CONDUCTANCE SELF-SHIELDING INSULATOR FOR ION IMPLANTATION SYSTEMS

INTEGRATED EMISSIVITY SENSOR ALIGNMENT CHARACTERIZATION