John Garcia

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Morgan Hill, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Rotary union for semiconductor wafer applications
- Patent number 6,402,602
- Issue date Jun 11, 2002
- SpeedFam-IPEC Corporation
- John Garcia
- B24 - GRINDING POLISHING

Patents Applicationslast 30 patents

Information Patent Application
ROTARY UNION FOR SEMICONDUCTOR WAFER APPLICATIONS
- Publication number 20020086617
- Publication date Jul 4, 2002
- SpeedFam-IPEC Corporation
- John Garcia
- B24 - GRINDING POLISHING