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VAPORIZATION VESSEL AND METHOD
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Publication number 20240084452
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Publication date Mar 14, 2024
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Entegris, Inc.
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Bryan C. HENDRIX
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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SUBLIMATION AMPOULE WITH LEVEL SENSING
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Publication number 20210123134
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Publication date Apr 29, 2021
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Entegris, Inc.
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John N. GREGG
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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VAPORIZATION VESSEL AND METHOD
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Publication number 20200340110
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Publication date Oct 29, 2020
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Entegris, Inc.
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Bryan C. HENDRIX
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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AMPOULE VAPORIZER AND VESSEL
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Publication number 20190186003
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Publication date Jun 20, 2019
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Entegris, Inc.
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David James ELDRIDGE
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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HEAT TRANSFER TO AMPOULE TRAYS
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Publication number 20190120433
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Publication date Apr 25, 2019
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Entegris, Inc.
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Bryan C. HENDRIX
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Canister guard
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Publication number 20040261896
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Publication date Dec 30, 2004
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John N. Gregg
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Vaporizer delivery ampoule
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Publication number 20040016404
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Publication date Jan 29, 2004
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John Gregg
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Bulk chemical delivery system
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Publication number 20020189709
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Publication date Dec 19, 2002
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Craig M. Noah
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Refillable ampule and method re same
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Publication number 20020038676
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Publication date Apr 4, 2002
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Stephen H. Siegele
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...