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John HARUFF
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San Jose, CA, US
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last 30 patents
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Patent Grant
Mass flow controller for substrate processing
Patent number
10,591,934
Issue date
Mar 17, 2020
Lam Research Corporation
Sudhakar Gopalakrishnan
G01 - MEASURING TESTING
Patents Applications
last 30 patents
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Patent Application
COOLING SYSTEM FOR RF POWER ELECTRONICS
Publication number
20200111688
Publication date
Apr 9, 2020
LAM RESEARCH CORPORATION
Sudhakar Gopalakrishinan
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
Mass Flow Controller for Substrate Processing
Publication number
20190279888
Publication date
Sep 12, 2019
LAM RESEARCH CORPORATION
Sudhakar Gopalakrishnan
G05 - CONTROLLING REGULATING
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Patent Application
COOLING SYSTEM FOR RF POWER ELECTRONICS
Publication number
20180235110
Publication date
Aug 16, 2018
LAM RESEARCH CORPORATION
Sudhakar GOPALAKRISHNAN
H01 - BASIC ELECTRIC ELEMENTS