John Hautala

Person

Beverly, MA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Techniques for void-free material depositions
- Patent number 12,131,948
- Issue date Oct 29, 2024
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Directional etch for improved dual deck three-dimensional NAND arch...
- Patent number 12,096,622
- Issue date Sep 17, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- B82 - NANO-TECHNOLOGY
Information Patent Grant
High aspect ratio taper improvement using directional deposition
- Patent number 11,987,879
- Issue date May 21, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Semiconductor device cavity formation using directional deposition
- Patent number 11,942,361
- Issue date Mar 26, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 11,908,691
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wordline contact formation in NAND devices
- Patent number 11,778,832
- Issue date Oct 3, 2023
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- G11 - INFORMATION STORAGE
Information Patent Grant
Techniques for void-free material depositions
- Patent number 11,749,564
- Issue date Sep 5, 2023
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 11,574,800
- Issue date Feb 7, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for selective shaping of mask features usi...
- Patent number 11,569,095
- Issue date Jan 31, 2023
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ion implantation to form step-oxide trench MOSFET
- Patent number 11,538,925
- Issue date Dec 27, 2022
- Applied Materials, Inc.
- Sipeng Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 11,488,823
- Issue date Nov 1, 2022
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical component having variable depth gratings and method of form...
- Patent number 11,404,278
- Issue date Aug 2, 2022
- Varian Semiconductor Equipment Associates, Inc.
- John Hautala
- G02 - OPTICS
Information Patent Grant
Techniques to engineer nanoscale patterned features using ions
- Patent number 11,043,380
- Issue date Jun 22, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and apparatus for selective shaping of mask features usi...
- Patent number 11,043,394
- Issue date Jun 22, 2021
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Performance improvement of EUV photoresist by ion implantation
- Patent number 10,990,014
- Issue date Apr 27, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Techniques for processing substrates using directional reactive ion...
- Patent number 10,971,368
- Issue date Apr 6, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device structure for forming semiconductor device having angled con...
- Patent number 10,886,279
- Issue date Jan 5, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Optical component having variable depth gratings and method of form...
- Patent number 10,818,499
- Issue date Oct 27, 2020
- Varian Semiconductor Equipment Associates, Inc.
- John Hautala
- G02 - OPTICS
Information Patent Grant
Device structure for forming semiconductor device having angled con...
- Patent number 10,692,872
- Issue date Jun 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and device for power rail in a fin type field effect transistor
- Patent number 10,685,865
- Issue date Jun 16, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Min Gyu Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extreme edge uniformity control
- Patent number 10,665,433
- Issue date May 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and structure for forming dynamic random-access device u...
- Patent number 10,629,437
- Issue date Apr 21, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques and structure for forming thin silicon-on-insulator mate...
- Patent number 10,600,675
- Issue date Mar 24, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Andrew M. Waite
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for processing a polycrystalline layer using an angled i...
- Patent number 10,553,448
- Issue date Feb 4, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Performance improvement of EUV photoresist by ion implantation
- Patent number 10,545,408
- Issue date Jan 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Filling a cavity in a substrate using sputtering and deposition
- Patent number 10,546,730
- Issue date Jan 28, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Techniques for improved spacer in nanosheet device
- Patent number 10,403,738
- Issue date Sep 3, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Min Gyu Sung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for manipulating patterned features using ions
- Patent number 10,381,232
- Issue date Aug 13, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multiple patterning approach using ion implantation
- Patent number 10,310,379
- Issue date Jun 4, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Techniques for forming patterned features using directional ions
- Patent number 10,229,832
- Issue date Mar 12, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Steven R. Sherman
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
TWO STEP IMPLANT TO IMPROVE LINE EDGE ROUGHNESS AND LINE WIDTH ROUG...
- Publication number 20240194540
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO STEP IMPLANT TO CONTROL TIP-TO-TIP DISTANCE BETWEEN TRENCHES
- Publication number 20240194541
- Publication date Jun 13, 2024
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICES AND METHODS FOR DRAM LEAKAGE REDUCTION
- Publication number 20240049443
- Publication date Feb 8, 2024
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM
- Publication number 20230402284
- Publication date Dec 14, 2023
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DEPOSITING LAYERS DIRECTLY ADJACENT UNCOVERED VIAS OR CO...
- Publication number 20230377888
- Publication date Nov 23, 2023
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR VOID-FREE MATERIAL DEPOSITIONS
- Publication number 20230369112
- Publication date Nov 16, 2023
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION
- Publication number 20230257872
- Publication date Aug 17, 2023
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...
- Publication number 20230135735
- Publication date May 4, 2023
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DIRECTIONAL ETCH FOR IMPROVED DUAL DECK THREE-DIMENSIONAL NAND ARCH...
- Publication number 20230119618
- Publication date Apr 20, 2023
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- B82 - NANO-TECHNOLOGY
Information Patent Application
MULTI PROCESS AIR GAP FORMATION
- Publication number 20230087442
- Publication date Mar 23, 2023
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS
- Publication number 20230020164
- Publication date Jan 19, 2023
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE CAVITY FORMATION USING DIRECTIONAL DEPOSITION
- Publication number 20220399225
- Publication date Dec 15, 2022
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORDLINE CONTACT FORMATION IN NAND DEVICES
- Publication number 20220352182
- Publication date Nov 3, 2022
- Applied Materials, Inc.
- Armin Saeedi Vahdat
- G11 - INFORMATION STORAGE
Information Patent Application
ION IMPLANTATION TO FORM STEP-OXIDE TRENCH MOSFET
- Publication number 20220190141
- Publication date Jun 16, 2022
- Applied Materials, Inc.
- Sipeng Gu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES FOR VOID-FREE MATERIAL DEPOSITIONS
- Publication number 20220093458
- Publication date Mar 24, 2022
- Applied Materials, Inc.
- M. Arif Zeeshan
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...
- Publication number 20210324519
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...
- Publication number 20210193478
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RIBBON BEAM PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM FOR AN...
- Publication number 20210189566
- Publication date Jun 24, 2021
- Applied Materials, Inc.
- John Hautala
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS
- Publication number 20210166936
- Publication date Jun 3, 2021
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL COMPONENT HAVING VARIABLE DEPTH GRATINGS AND METHOD OF FORM...
- Publication number 20210005461
- Publication date Jan 7, 2021
- Varian Semiconductor Equipment Associates, Inc.
- John Hautala
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...
- Publication number 20200279852
- Publication date Sep 3, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Extreme Edge Uniformity Control
- Publication number 20200243308
- Publication date Jul 30, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Alexandre Likhanskii
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
- Publication number 20200096870
- Publication date Mar 26, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION
- Publication number 20200090909
- Publication date Mar 19, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Simon Ruffell
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DEVICE STRUCTURE AND TECHNIQUES FOR FORMING SEMICONDUCTOR DEVICE HA...
- Publication number 20200027832
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DIRECTIONAL DEPOSITION FOR PATTERNING THREE-DIMENSIONAL STRUCTURES
- Publication number 20200027733
- Publication date Jan 23, 2020
- Varian Semiconductor Equipment Associates, Inc.
- JOHN HAUTALA
- B29 - WORKING OF PLASTICS WORKING OF SUBSTANCES IN A PLASTIC STATE, IN GENERAL
Information Patent Application
TECHNIQUES AND STRUCTURE FOR FORMING DYNAMIC RANDOM-ACCESS DEVICE U...
- Publication number 20190348287
- Publication date Nov 14, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL COMPONENT HAVING VARIABLE DEPTH GRATINGS AND METHOD OF FORM...
- Publication number 20190258008
- Publication date Aug 22, 2019
- Varian Semiconductor Equipment Associates, Inc.
- John Hautala
- G02 - OPTICS
Information Patent Application
DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...
- Publication number 20190181144
- Publication date Jun 13, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Sony Varghese
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION
- Publication number 20190056914
- Publication date Feb 21, 2019
- Varian Semiconductor Equipment Associates, Inc.
- Tristan Y. Ma
- G06 - COMPUTING CALCULATING COUNTING

John Hautala

Person

Patents Grantslast 30 patents

Techniques for void-free material depositions

Directional etch for improved dual deck three-dimensional NAND arch...

High aspect ratio taper improvement using directional deposition

Semiconductor device cavity formation using directional deposition

Techniques to engineer nanoscale patterned features using ions

Wordline contact formation in NAND devices

Techniques for void-free material depositions

Extreme edge uniformity control

Techniques and apparatus for selective shaping of mask features usi...

Ion implantation to form step-oxide trench MOSFET

Techniques to engineer nanoscale patterned features using ions

Optical component having variable depth gratings and method of form...

Techniques to engineer nanoscale patterned features using ions

Techniques and apparatus for selective shaping of mask features usi...

Performance improvement of EUV photoresist by ion implantation

Techniques for processing substrates using directional reactive ion...

Device structure for forming semiconductor device having angled con...

Optical component having variable depth gratings and method of form...

Device structure for forming semiconductor device having angled con...

Method and device for power rail in a fin type field effect transistor

Extreme edge uniformity control

Techniques and structure for forming dynamic random-access device u...

Techniques and structure for forming thin silicon-on-insulator mate...

Techniques for processing a polycrystalline layer using an angled i...

Performance improvement of EUV photoresist by ion implantation

Filling a cavity in a substrate using sputtering and deposition

Techniques for improved spacer in nanosheet device

Techniques for manipulating patterned features using ions

Multiple patterning approach using ion implantation

Techniques for forming patterned features using directional ions

Patents Applicationslast 30 patents

TWO STEP IMPLANT TO IMPROVE LINE EDGE ROUGHNESS AND LINE WIDTH ROUG...

TWO STEP IMPLANT TO CONTROL TIP-TO-TIP DISTANCE BETWEEN TRENCHES

DEVICES AND METHODS FOR DRAM LEAKAGE REDUCTION

PATTERNING LAYER MODIFICATION USING DIRECTIONAL RADICAL RIBBON BEAM

METHOD FOR DEPOSITING LAYERS DIRECTLY ADJACENT UNCOVERED VIAS OR CO...

TECHNIQUES FOR VOID-FREE MATERIAL DEPOSITIONS

HIGH ASPECT RATIO TAPER IMPROVEMENT USING DIRECTIONAL DEPOSITION

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

DIRECTIONAL ETCH FOR IMPROVED DUAL DECK THREE-DIMENSIONAL NAND ARCH...

MULTI PROCESS AIR GAP FORMATION

TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS

SEMICONDUCTOR DEVICE CAVITY FORMATION USING DIRECTIONAL DEPOSITION

WORDLINE CONTACT FORMATION IN NAND DEVICES

ION IMPLANTATION TO FORM STEP-OXIDE TRENCH MOSFET

TECHNIQUES FOR VOID-FREE MATERIAL DEPOSITIONS

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

TECHNIQUES AND APPARATUS FOR SELECTIVE SHAPING OF MASK FEATURES USI...

RIBBON BEAM PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION SYSTEM FOR AN...

TECHNIQUES TO ENGINEER NANOSCALE PATTERNED FEATURES USING IONS

OPTICAL COMPONENT HAVING VARIABLE DEPTH GRATINGS AND METHOD OF FORM...

DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...

Extreme Edge Uniformity Control

PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION

FILLING A CAVITY IN A SUBSTRATE USING SPUTTERING AND DEPOSITION

DEVICE STRUCTURE AND TECHNIQUES FOR FORMING SEMICONDUCTOR DEVICE HA...

DIRECTIONAL DEPOSITION FOR PATTERNING THREE-DIMENSIONAL STRUCTURES

TECHNIQUES AND STRUCTURE FOR FORMING DYNAMIC RANDOM-ACCESS DEVICE U...

OPTICAL COMPONENT HAVING VARIABLE DEPTH GRATINGS AND METHOD OF FORM...

DEVICE STRUCTURE FOR FORMING SEMICONDUCTOR DEVICE HAVING ANGLED CON...

PERFORMANCE IMPROVEMENT OF EUV PHOTORESIST BY ION IMPLANTATION