John Holland

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Uniformity control circuit for impedance match
- Patent number 12,165,844
- Issue date Dec 10, 2024
- Lam Research Corporation
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead faceplates with angled gas distribution passages for sem...
- Patent number 12,139,791
- Issue date Nov 12, 2024
- Lam Research Corporation
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Systems and methods for extracting process control information from...
- Patent number 12,131,886
- Issue date Oct 29, 2024
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Impedance match with an elongated RF strap
- Patent number 12,080,518
- Issue date Sep 3, 2024
- Lam Research Corporation
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucks with coolant gas zones and corresponding groov...
- Patent number 11,942,351
- Issue date Mar 26, 2024
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed synchronization of plasma source/bias power delivery
- Patent number 11,935,726
- Issue date Mar 19, 2024
- MKS Instruments, Inc.
- Aaron T. Radomski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for cleaning an edge ring pocket
- Patent number 11,935,730
- Issue date Mar 19, 2024
- Lam Research Corporation
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
- Patent number 11,908,660
- Issue date Feb 20, 2024
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 11,887,819
- Issue date Jan 30, 2024
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chucks with coolant gas zones and corresponding groov...
- Patent number 11,664,262
- Issue date May 30, 2023
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic Chuck design for cooling-gas light-up prevention
- Patent number 11,651,991
- Issue date May 16, 2023
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 11,495,441
- Issue date Nov 8, 2022
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for optimizing power delivery to an electrode o...
- Patent number 11,335,539
- Issue date May 17, 2022
- Lam Research Corporation
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving a pre-determined factor associate...
- Patent number 11,195,706
- Issue date Dec 7, 2021
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High speed synchronization of plasma source/bias power delivery
- Patent number 11,158,488
- Issue date Oct 26, 2021
- MKS Instruments, Inc.
- Aaron T. Radomski
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck with features for preventing electrical arcing...
- Patent number 11,069,553
- Issue date Jul 20, 2021
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck design for cooling-gas light-up prevention
- Patent number 11,024,532
- Issue date Jun 1, 2021
- Lam Research Corporation
- Alexander Matyushkin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Active control of radial etch uniformity
- Patent number 10,916,409
- Issue date Feb 9, 2021
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three or more states for achieving high aspect ratio dielectric etch
- Patent number 10,861,708
- Issue date Dec 8, 2020
- Lam Research Corporation
- Takumi Yanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems for cooling RF heated chamber components
- Patent number 10,825,661
- Issue date Nov 3, 2020
- Lam Research Corporation
- Jon McChesney
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,825,656
- Issue date Nov 3, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Ion energy control by RF pulse shape
- Patent number 10,755,895
- Issue date Aug 25, 2020
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,665,435
- Issue date May 26, 2020
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for controlling directionality of ions in an ed...
- Patent number 10,615,003
- Issue date Apr 7, 2020
- Lam Research Corporation
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Three or more states for achieving high aspect ratio dielectric etch
- Patent number 10,504,744
- Issue date Dec 10, 2019
- Lam Research Corporation
- Takumi Yanagawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Chamber with vertical support stem for symmetric conductance and RF...
- Patent number 10,395,902
- Issue date Aug 27, 2019
- Lam Research Corporation
- Daniel Arthur Brown
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for tailoring ion energy distribution function...
- Patent number 10,340,122
- Issue date Jul 2, 2019
- Lam Research Corporation
- Zhigang Chen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi regime plasma wafer processing to increase directionality of...
- Patent number 10,304,662
- Issue date May 28, 2019
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for achieving a pre-determined factor associate...
- Patent number 10,283,330
- Issue date May 7, 2019
- Lam Research Corporation
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support assembly
- Patent number 10,257,887
- Issue date Apr 9, 2019
- Applied Materials, Inc.
- Alexander Matyushkin
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...

Patents Applicationslast 30 patents

Information Patent Application
EXTREME EDGE FEATURE PROFILE TILT CONTROL BY ALTERING INPUT VOLTAGE...
- Publication number 20240420929
- Publication date Dec 19, 2024
- LAM RESEARCH CORPORATION
- Rajesh Dorai
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
- Publication number 20240395504
- Publication date Nov 28, 2024
- LAM RESEARCH CORPORATION
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DISTORTION OF PULSES FOR WAFER BIASING
- Publication number 20240266153
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Karl Frederick Leeser
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240266151
- Publication date Aug 8, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
- Publication number 20240186112
- Publication date Jun 6, 2024
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER
- Publication number 20240162015
- Publication date May 16, 2024
- LAM RESEARCH CORPORATION
- Michael C. Kellogg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Use of Low Frequency Harmonics in Bias Radi...
- Publication number 20230317414
- Publication date Oct 5, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Systems and Methods for Extracting Process Control Information from...
- Publication number 20230298857
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA UNIFORMITY CONTROL USING A STATIC MAGNETIC FIELD
- Publication number 20230298866
- Publication date Sep 21, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK
- Publication number 20230274914
- Publication date Aug 31, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS
- Publication number 20230260768
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Theodoros Panagopoulos
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...
- Publication number 20230260816
- Publication date Aug 17, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH
- Publication number 20230253184
- Publication date Aug 10, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC
- Publication number 20230245874
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...
- Publication number 20230243034
- Publication date Aug 3, 2023
- LAM RESEARCH CORPORATION
- Pratik Mankidy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PROCESS CONTROL FOR ION ENERGY DELIVERY USING MULTIPLE GENERATORS A...
- Publication number 20230230804
- Publication date Jul 20, 2023
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA UNIFORMITY CONTROL USING A PULSED MAGNETIC FIELD
- Publication number 20230223242
- Publication date Jul 13, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY
- Publication number 20230215694
- Publication date Jul 6, 2023
- LAM RESEARCH CORPORATION
- Alexei M. Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COOLED EDGE RING WITH INTEGRATED SEALS
- Publication number 20230133798
- Publication date May 4, 2023
- LAM RESEARCH CORPORATION
- Adam Christopher MACE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS
- Publication number 20230128551
- Publication date Apr 27, 2023
- LAM RESEARCH CORPORATION
- Yohan SEEPERSAD
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMPEDANCE MATCH WITH AN ELONGATED RF STRAP
- Publication number 20230081542
- Publication date Mar 16, 2023
- LAM RESEARCH CORPORATION
- Felix Leib Kozakevich
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS
- Publication number 20230071249
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Scott Briggs
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING
- Publication number 20230075462
- Publication date Mar 9, 2023
- LAM RESEARCH CORPORATION
- Alexander MATYUSHKIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL
- Publication number 20230063007
- Publication date Mar 2, 2023
- LAM RESEARCH CORPORATION
- John Holland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Radiofrequency Signal Filter Arrangement for Plasma Processing System
- Publication number 20230054699
- Publication date Feb 23, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Optimization of Radiofrequency Signal Ground Return in Plasma Proce...
- Publication number 20230059495
- Publication date Feb 23, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS
- Publication number 20230039721
- Publication date Feb 9, 2023
- LAM RESEARCH CORPORATION
- Jon MCCHESNEY
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR USING BINNING TO INCREASE POWER DURING A LO...
- Publication number 20230007885
- Publication date Jan 12, 2023
- LAM RESEARCH CORPORATION
- Alexei Marakhtanov
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET
- Publication number 20220254616
- Publication date Aug 11, 2022
- LAM RESEARCH CORPORATION
- Eric Hudson
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...
- Publication number 20220199366
- Publication date Jun 23, 2022
- LAM RESEARCH CORPORATION
- Ranadeep Bhowmick
- H01 - BASIC ELECTRIC ELEMENTS

John Holland

Person

Patents Grantslast 30 patents

Uniformity control circuit for impedance match

Showerhead faceplates with angled gas distribution passages for sem...

Systems and methods for extracting process control information from...

Impedance match with an elongated RF strap

Electrostatic chucks with coolant gas zones and corresponding groov...

High speed synchronization of plasma source/bias power delivery

Systems and methods for cleaning an edge ring pocket

Systems and methods for optimizing power delivery to an electrode o...

Systems for cooling RF heated chamber components

Electrostatic chucks with coolant gas zones and corresponding groov...

Electrostatic Chuck design for cooling-gas light-up prevention

Systems for cooling RF heated chamber components

Systems and methods for optimizing power delivery to an electrode o...

Systems and methods for achieving a pre-determined factor associate...

High speed synchronization of plasma source/bias power delivery

Electrostatic chuck with features for preventing electrical arcing...

Electrostatic chuck design for cooling-gas light-up prevention

Active control of radial etch uniformity

Three or more states for achieving high aspect ratio dielectric etch

Systems for cooling RF heated chamber components

Systems and methods for controlling directionality of ions in an ed...

Ion energy control by RF pulse shape

Chamber with vertical support stem for symmetric conductance and RF...

Systems and methods for controlling directionality of ions in an ed...

Three or more states for achieving high aspect ratio dielectric etch

Chamber with vertical support stem for symmetric conductance and RF...

Systems and methods for tailoring ion energy distribution function...

Multi regime plasma wafer processing to increase directionality of...

Systems and methods for achieving a pre-determined factor associate...

Substrate support assembly

Patents Applicationslast 30 patents

EXTREME EDGE FEATURE PROFILE TILT CONTROL BY ALTERING INPUT VOLTAGE...

IMPEDANCE MATCH WITH AN ELONGATED RF STRAP

DISTORTION OF PULSES FOR WAFER BIASING

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...

RING STRUCTURES AND SYSTEMS FOR USE IN A PLASMA CHAMBER

Systems and Methods for Use of Low Frequency Harmonics in Bias Radi...

Systems and Methods for Extracting Process Control Information from...

PLASMA UNIFORMITY CONTROL USING A STATIC MAGNETIC FIELD

LOW FREQUENCY RF GENERATOR AND ASSOCIATED ELECTROSTATIC CHUCK

PLASMA DISCHARGE UNIFORMITY CONTROL USING MAGNETIC FIELDS

ELECTROSTATIC CHUCKS WITH COOLANT GAS ZONES AND CORRESPONDING GROOV...

UNIFORMITY CONTROL CIRCUIT FOR IMPEDANCE MATCH

SYSTEMS AND METHODS FOR CONTROLLING A PLASMA SHEATH CHARACTERISTIC

SHOWERHEAD FACEPLATES WITH ANGLED GAS DISTRIBUTION PASSAGES FOR SEM...

PROCESS CONTROL FOR ION ENERGY DELIVERY USING MULTIPLE GENERATORS A...

PLASMA UNIFORMITY CONTROL USING A PULSED MAGNETIC FIELD

DUTY CYCLE CONTROL TO ACHIEVE UNIFORMITY

COOLED EDGE RING WITH INTEGRATED SEALS

EDGE RING FOR LOCALIZED DELIVERY OF TUNING GAS

IMPEDANCE MATCH WITH AN ELONGATED RF STRAP

ETCHING AND PLASMA UNIFORMITY CONTROL USING MAGNETICS

ELECTROSTATIC EDGE RING MOUNTING SYSTEM FOR SUBSTRATE PROCESSING

TUNABILITY OF EDGE PLASMA DENSITY FOR TILT CONTROL

Radiofrequency Signal Filter Arrangement for Plasma Processing System

Optimization of Radiofrequency Signal Ground Return in Plasma Proce...

SYSTEMS FOR COOLING RF HEATED CHAMBER COMPONENTS

SYSTEMS AND METHODS FOR USING BINNING TO INCREASE POWER DURING A LO...

SYSTEMS AND METHODS FOR CLEANING AN EDGE RING POCKET

SYSTEMS AND METHODS FOR OPTIMIZING POWER DELIVERY TO AN ELECTRODE O...