John K. Shugrue

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Fremont, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Anhydrous HF in-situ cleaning process of semiconductor processing c...
- Patent number 6,095,158
- Issue date Aug 1, 2000
- Lam Research Corporation
- John K. Shugrue
- B08 - CLEANING
Information Patent Grant
Method for forming semiconductor structure using modulation doped s...
- Patent number 5,770,469
- Issue date Jun 23, 1998
- Lam Research Corporation
- Kevin J. Uram
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...