John L. Vaught

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Palo Alto, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Adaptive spatial filter for surface inspection
- Patent number 5,276,498
- Issue date Jan 4, 1994
- Tencor Instruments
- Lee K. Galbraith
- G02 - OPTICS
Information Patent Grant
Speckle reduction track filter apparatus for optical inspection of...
- Patent number 5,264,912
- Issue date Nov 23, 1993
- Tencor Instruments
- John L. Vaught
- G02 - OPTICS
Information Patent Grant
Method and apparatus for detecting and sizing particles on surfaces
- Patent number 4,967,095
- Issue date Oct 30, 1990
- Tencor Instruments
- Josef Berger
- G01 - MEASURING TESTING
Information Patent Grant
Particle detection on patterned wafers and the like
- Patent number 4,898,471
- Issue date Feb 6, 1990
- Tencor Instruments
- John L. Vaught
- G01 - MEASURING TESTING
Information Patent Grant
Suspension assembly for a scanning mirror
- Patent number 4,861,125
- Issue date Aug 29, 1989
- Tencor Instruments
- John L. Vaught
- G02 - OPTICS