John Lilleland

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San Jose, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing assembly for plasma reaction chamber and us...
- Patent number 6,376,385
- Issue date Apr 23, 2002
- Lam Research Corporation
- John Lilleland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for plasma processes and method for a manufacture and use...
- Patent number 6,194,322
- Issue date Feb 27, 2001
- Lam Research Corporation
- John Lilleland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for plasma processes and method for manufacture and use t...
- Patent number 6,148,765
- Issue date Nov 21, 2000
- Lam Research Corporation
- John Lilleland
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrode for plasma processes and method for manufacture and use t...
- Patent number 6,073,577
- Issue date Jun 13, 2000
- Lam Research Corporation
- John Lilleland
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Electrode for plasma processes and method for manufacture and use t...
- Publication number 20010031557
- Publication date Oct 18, 2001
- John Lilleland
- H01 - BASIC ELECTRIC ELEMENTS